Oh-Jung Kwon

Method for manufacturing tungsten/polysilicon word line structure in vertical dram and device manufactured thereby

Method for manufacturing tungsten/polysilicon word line structure in vertical DRAM

Method of fabricating a bottle trench and a bottle trench capacitor

SELF-ALIGNED, SILICIDED, TRENCH-BASED DRAM/eDRAM PROCESSES WITH IMPROVED RETENTION

Structure and method for forming isolation and buried plate for trench capacitor

Dual Stress STI

Method for forming a self-aligned contact with a silicide or damascene conductor and the structure formed thereby

Structure and Method of Three Dimensional Hybrid Orientation Technology

Method of fabricating a deep trench (dt) metal-insulator-metal (mim) capacitor

TEST PATTERN FOR MEASURING CONTACT SHORT AT FIRST METAL LEVEL