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Paul B. Comita

Applied Materials

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Publication

Featured researches published by Paul B. Comita.

Archive | 2002

Apparatus and method for surface finishing a silicon film

Annalena Thilderkvist; Paul B. Comita; Lance A. Scudder; Norma B. Riley

Archive | 2003

Method for fabricating an ultra shallow junction of a field effect transistor

Wei Liu; David Mui; Lance A. Scudder; Paul B. Comita; Arkadii V. Samoilov; Babak Adibi

Archive | 2002

Process and apparatus for cleaning a silicon surface

Arkadii V. Samoilov; Dale R. DuBois; Bradley M. Curelop; David R. Carlson; Paul B. Comita

Archive | 2003

Apparatuses and methods for forming a substantially facet-free epitaxial film

Jean R. Vatus; Lance A. Scudder; Paul B. Comita

Archive | 2003

Silicon-containing layer deposition with silicon compounds

Kaushal K. Singh; Paul B. Comita; Lance A. Scudder; David K. Carlson

Archive | 2002

Apparatuses and methods for depositing an oxide film

Roger N. Anderson; Paul B. Comita; Ann P. Waldhauer; Norma B. Riley

Archive | 1998

Method of cleaning CVD cold-wall chamber and exhaust lines

Paul B. Comita; Hali J. L. Forstner; Rekha Ranganathan

Archive | 2002

Apparatus and method for automatically controlling gas flow in a substrate processing system

Karin Anna Lena Thilderkvist; Christopher Todd Fulmer; Paul B. Comita; Annie A. Karpati

Archive | 2002

Apparatus and method for delivering process gas to a substrate processing system

Arkadii V. Samoilov; Paul B. Comita

Archive | 2003

Apparatuses and methods for treating a silicon film

Ann P. Waldhauer; Paul B. Comita

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Collaboration

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David K. Carlson

Applied Materials

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Norma B. Riley

Applied Materials

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Ann P. Waldhauer

Applied Materials

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Lance A. Scudder

Applied Materials

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Rekha Ranganathan

Applied Materials

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Roger N. Anderson

Applied Materials

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Annalena Thilderkvist

Applied Materials

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Arkadii V. Samoilov

Applied Materials

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Doria W. Fan

Applied Materials

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Dale R. DuBois

Applied Materials

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