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Dive into the research topics where Norma B. Riley is active.

Publication


Featured researches published by Norma B. Riley.


Archive | 2002

Apparatus and method for surface finishing a silicon film

Annalena Thilderkvist; Paul B. Comita; Lance A. Scudder; Norma B. Riley


Archive | 2002

Apparatuses and methods for depositing an oxide film

Roger N. Anderson; Paul B. Comita; Ann P. Waldhauer; Norma B. Riley


Archive | 1995

Gas inlets for wafer processing chamber

Roger N. Anderson; Peter Hey; David K. Carlson; Mahalingam Venkatesan; Norma B. Riley


Archive | 1991

Process for inhibiting slip and microcracking while forming epitaxial layer on semiconductor wafer

Lance A. Scudder; Norma B. Riley


Archive | 1997

Method of determining a wafer characteristic using a film thickness monitor

Ann P. Waldhauer; Norma B. Riley; Paul B. Comita


Archive | 1997

Method and apparatus for controlling the temperature of reaction chamber walls

David K. Carlson; Norma B. Riley; Roger N. Anderson


Archive | 2000

Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates

Norma B. Riley; Roger N. Anderson; Grant D. Imper; Paul B. Comita


Archive | 1991

Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus

Paul Deaton; Norma B. Riley; James V. Rinnovatore


Archive | 1997

Method for heating exhaust gas in a substrate reactor

Paul B. Comita; David K. Carlson; Norma B. Riley; Doria W. Fan; Rekha Ranganathan


Archive | 1992

Processing method for growing thick films

Lance A. Scudder; Norma B. Riley; Jon M. Schalla

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