Is this you? Create Your Porfile
Avatar

Dale R. DuBois

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Dale R. DuBois is active.

Explore More

Publication

Featured researches published by Dale R. DuBois.

Archive | 1996

Resistance heated stem mounted aluminum susceptor assembly

Michio Aruga; Atsunobu Ohkura; Akihiko Saito; Kenji Suzuki; Kenichi Taguchi; Dale R. DuBois; Alan F. Morrison

Archive | 2002

Process and apparatus for cleaning a silicon surface

Arkadii V. Samoilov; Dale R. DuBois; Bradley M. Curelop; David R. Carlson; Paul B. Comita

Archive | 1997

CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER

Michal Danek; Marvin Liao; Eric A. Englhardt; Mei Chang; Yeh-Jen Kao; Dale R. DuBois; Alan F. Morrison

Archive | 2008

Systems for plasma enhanced chemical vapor deposition and bevel edge etching

Ashish Shah; Dale R. DuBois; Ganesh Balasubramanian; Mark Fodor; Eui Kyoon Kim; Chiu Chan; Karthik Janakiraman; Thomas Nowak; Joseph C. Werner; Visweswaren Sivaramakrishnan; Mohamad A. Ayoub; Amir Al-Bayati; Jianhua Zhou

Archive | 1996

Heater with shadow ring and purge above wafer surface

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei; Dale R. DuBois

Archive | 1994

Substrate support shield in wafer processing reactors

Dale R. DuBois; Alan F. Morrison; Richard A. Marsh; Mei Chang

Archive | 2001

Backside heating chamber for emissivity independent thermal processes

Arkadii V. Samoilov; Dale R. DuBois; Lance A. Scudder; Paul B. Comita; Lori D. Washington; David K. Carlson; Roger N. Anderson

Archive | 1993

Lift fingers for substrate processing apparatus

Sandy M. Chew; Shane D. Clark; Ron Rose; Dale R. DuBois; Cissy Leung; Alan F. Morrison; Manus Wong

Archive | 1994

Welded susceptor assembly

Sandy M. Chew; Dale R. DuBois; Ronald L. Rose; Manus Wong

Archive | 1994

Improvements in or relating to susceptors suitable for use in chemical vapour deposition devices

Michio Aruga; Atsunobu Ohkura; Akihiko Saito; Kenji Suzuki; Kenichi Taguchi; Dale R. DuBois; Alan F. Morrison

Explore More

Collaboration

Dive into the Dale R. DuBois's collaboration.

Top Co-Authors
Avatar

Alan F. Morrison

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Mei Chang

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Richard A. Marsh

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Paul B. Comita

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Akihiko Saito

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Atsunobu Ohkura

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

David K. Carlson

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Eric A. Englhardt

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Juan Carlos Rocha-Alvarez

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Kenichi Taguchi

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge