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Paul Moroz

Tokyo Electron

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Publication

Featured researches published by Paul Moroz.

Archive | 2005

Method and apparatus for temperature change and control

Paul Moroz

Archive | 2003

Method and system for arc suppression in a plasma processing system

Paul Moroz; Eric J. Strang

Archive | 2004

Hybrid plasma processing apparatus

Paul Moroz

Archive | 2002

Branching RF antennas and plasma processing apparatus

Paul Moroz

Archive | 2005

Method and system for substrate temperature profile control

Yuji Tsukamoto; Paul Moroz; Nobuhiro Iwama; Shinji Hamamoto

Archive | 2002

Plasma processing apparatus for spatial control of dissociation and ionization

Eric J. Strang; Paul Moroz; Steven T. Fink

Archive | 2006

Intelligent system for detection of process status, process fault and preventive maintenance

Jozef Brcka; Deana R. Delp; Michael Grapperhaus; Paul Moroz

Archive | 2006

Electron beam enhanced surface wave plasma source

Lee Chen; Paul Moroz

Archive | 2007

Plasma chamber wall segment temperature control

Andrej S. Mitrovic; Maolin Long; Paul Moroz; Steven T. Fink; William D. Jones

Archive | 2002

Apparatus and method for determining clamping status of semiconductor wafer

William D. Jones; Paul Moroz; Andrej S. Mitrovic

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Collaboration

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Eric J. Strang

Tokyo Electron

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Andrej S. Mitrovic

Tokyo Electron

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Lee Chen

Tokyo Electron

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Nobuhiro Iwama

Tokyo Electron

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Shinji Hamamoto

Tokyo Electron

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Steven T. Fink

Tokyo Electron

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William D. Jones

Tokyo Electron

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Yuji Tsukamoto

Tokyo Electron

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Deana R. Delp

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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