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Steven T. Fink

Tokyo Electron

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Publication

Featured researches published by Steven T. Fink.

Archive | 2001

Probe cartridge assembly and multi-probe assembly

Steven T. Fink; Thomas H. Windhorn

Archive | 2005

Method and apparatus for delivering process gas to a process chamber

Steven T. Fink

Archive | 2003

Thermally zoned substrate holder assembly

Steven T. Fink; Eric J. Strang

Archive | 2004

Method and apparatus for improved baffle plate

Steven T. Fink

Archive | 2004

Hybrid ball-lock attachment apparatus

Steven T. Fink

Archive | 2003

Method and apparatus for tuning a plasma reactor chamber

Eric J. Strang; Wayne L. Johnson; Robert G. Hostetler; Steven T. Fink

Archive | 2002

Cylinder-based plasma processing system

Steven T. Fink

Archive | 2005

Pressure control and plasma confinement in a plasma processing chamber

Steven T. Fink

Archive | 2004

Asymmetrical focus ring

Steven T. Fink

Archive | 2003

Method and apparatus for improved focus ring

Michael Landis; Steven T. Fink

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Eric J. Strang

Tokyo Electron

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Wayne L. Johnson

Tokyo Electron

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Andrej S. Mitrovic

Tokyo Electron

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Michael Landis

Tokyo Electron

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Thomas H. Windhorn

Tokyo Electron

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Jeff Browning

Tokyo Electron

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Jovan Jevtic

Tokyo Electron

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Paul Moroz

Tokyo Electron

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Robert G. Hostetler

Tokyo Electron

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Arthur H. Laflamme

Tokyo Electron

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