Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Paul W. Pastel is active.

Publication


Featured researches published by Paul W. Pastel.


electronic components and technology conference | 2007

Pattern Density Methodology Using IBM Foundry Technologies

David Scagnelli; Casey J. Grant; Keith M. Carrig; Tim Kemerer; Howard S. Landis; Tom McDevitt; Jeanne-Tania Sucharitaves; Esther Tsai; Mukesh Kumar; Paul W. Pastel

An overview of important pattern density requirements and tradeoffs for advanced RF, analog and digital technologies is presented. This paper reviews process sensitivities to pattern density, the advantage of pattern density compliant designs, performance and modeling considerations, and presents methods of detecting and enhancing pattern density deficiencies to improve overall manufacturability.


Archive | 1998

Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby

Jeffrey S. Brown; James S. Dunn; Steven J. Holmes; Cuc K. Huynh; Robert K. Leidy; Paul W. Pastel


Archive | 1993

Symmetrical etching ring with gas control

Michael Edward Bailey; Dinh Dang; James G. Michael; Timothy E. Neary; Paul W. Pastel; Sylvia Tousley; Arthur C. Winslow


Archive | 1999

Device having integrated optical and copper conductors and method of fabricating same

James W. Adkisson; Paul W. Pastel; Anthony K. Stamper


Archive | 1998

Method of forming planar isolation and substrate contacts in SIMOX-SOI.

James W. Adkisson; Jerome B. Lasky; Paul W. Pastel; Jed H. Rankin


Archive | 2008

ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKED BY RESIST

Timothy J. Dalton; Wesley C. Natzle; Paul W. Pastel; Richard S. Wise; Hongwen Yan; Ying Zhang


Archive | 2000

Method for conditioning process chambers

John M. Baker; Marc W. Cantell; Paul W. Pastel; Alejandro G. Schrott; Ying Zhang


Archive | 1999

METHOD FOR FORMING FLAT SEPARATE AREA INTO SEMICONDUCTOR SUBSTRATE

James W. Adkisson; Jerome B Laskey; Paul W. Pastel; Jeddo H Rankin


Archive | 1998

Method for semiconductor fabrication

James W. Adkisson; Jerome B. Lasky; Paul W. Pastel; Jed H. Rankin


Archive | 2004

INSPECTION METHODS AND STRUCTURES FOR VISUALIZING AND/OR DETECTING SPECIFIC CHIP STRUCTURES

Jerome L. Cann; Steven J. Holmes; Leendert M. Huisman; Cherie R. Kagan; Leah M. P. Pastel; Paul W. Pastel; James R. Salimeno; David P. Vallett

Researchain Logo
Decentralizing Knowledge