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Dive into the research topics where Kien N. Chuc is active.

Publication


Featured researches published by Kien N. Chuc.


Archive | 2007

Process chamber for dielectric gapfill

Dmitry Lubomirsky; Qiwei Liang; Soonam Park; Kien N. Chuc; Ellie Yieh


Archive | 2010

Flow control features of cvd chambers

Kien N. Chuc; Qiwei Liang; Hanh D. Nguyen; Matthew L. Miller; Soonam Park; Toan Q. Tran; Adib Khan; Jang-Gyoo Yang; Dmitry Lubomirsky; Shankar Venkataraman


Archive | 2011

Semiconductor processing system and methods using capacitively coupled plasma

Jang-Gyoo Yang; Matthew L. Miller; Kien N. Chuc; Qiwei Liang; Shankar Venkataraman; Dmitry Lubomirsky


Archive | 2013

Chemical control features in wafer process equipment

Qiwei Liang; Kien N. Chuc; Dimitry Lubomirsky; Soonam Park; Jang-Gyoo Yang; Shankar Venkataraman; Toan Tran; Kimberly Hinckley; Saurabh Garg


Archive | 2000

Plasma reactor inductive coil antenna with flat surface facing the plasma

Jonathan D. Mohn; Arthur H. Sato; Kien N. Chuc


Archive | 1990

Calibration technique for monochromators and spectrophotometers

Monoocher Birang; Kien N. Chuc; Ronnie Northrup; Bruno Strul


Archive | 1991

Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport

Peter Ebbing; Kien N. Chuc; Jack Ford; Fred H. Hariz; Michael Sugarman


Archive | 1994

Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation

Peter Ebbing; Kien N. Chuc


Archive | 1995

Method and apparatus for dry vapor generation

Kien N. Chuc; Peter Ebbing


Archive | 2016

PROCESS KIT INCLUDING FLOW ISOLATOR RING

Bois Dale R. Du; Kalyanjit Ghosh; Kien N. Chuc; Mayur G. Kulkarni; Sanjeev Baluja; Yanjie Wang; Sungjin Kim

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