Mark W. Curry | Researchain

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Publication

Featured researches published by Mark W. Curry.

Archive | 2003

Variable speed pump control

Mark W. Curry; Daniel Paul Greenbank; Danny Cam Toan Lu

Archive | 2006

Methods and apparatus for process abatement

Sebastien Raoux; Brian Kingston; Mark W. Curry; Daniel O. Clark; Robbert M. Vermeulen; Belynda Flippo; Mark Holst; Steve Tsu; Kevin Lin; Monique Mcintosh

Archive | 2002

Speed control of variable speed control pump

Mark W. Curry; Daniel Paul Greenbank; Danny Cam Toan Lu

Archive | 2007

Method and apparatus for improved operation of an abatement system

Peter I. Porshnev; Mark W. Curry; Sebastien Raoux

Archive | 2007

Methods and apparatus for improving operation of an electronic device manufacturing system

Sebastien Raoux; Mark W. Curry; Peter I. Porshnev; Allen Fox

Archive | 2002

Speed control of variable speed pump

Mark W. Curry; Daniel Paul Greenbank; Danny Cam Toan Lu

Archive | 2007

Methods and apparatus for pressure control in electronic device manufacturing systems

Mark W. Curry; Sebastien Raoux; Peter I. Porshnev

Archive | 2009

Abatement of effluent gas

Kenneth Tsai; Peter I. Porshnev; Mark W. Curry; Sebastien Raoux

Archive | 2000

Safety guard for an RF connector

William N. Taylor; Richard R. Mett; Mark W. Curry

Archive | 2008

APPARATUS AND METHODS FOR REDUCING RESTRICTIONS TO AIR FLOW IN AN ABATEMENT SYSTEM

Mark W. Curry; Shaun W. Crawford; Barry Page; Robbert M. Vermeulen; Allen Fox; Daniel S. Brown; Rene T. Correa; Youssef A. Loldj; William D. Pyzel; Daniel O. Clark

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