Is this you? Create Your Porfile
Avatar

Phillip D. Matz

Texas Instruments

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Phillip D. Matz is active.

Explore More

Publication

Featured researches published by Phillip D. Matz.

Archive | 2003

Chemical treatment of low-k dielectric films

Changming Jin; Phillip D. Matz; Heungsoo Park; Patricia B. Smith; Andrew J. McKerrow

Archive | 2003

Hexamethyldisilazane treatment of low-k dielectric films

Phillip D. Matz; Patricia B. Smith; Heungsoo Park; Changming Jin; Andrew J. McKerrow

Archive | 2004

Use of supercritical fluid for low effective dielectric constant metallization

Satyavolu Srinivas Papa Rao; Stephan Grunow; Phillip D. Matz

Archive | 2009

Air gap in integrated circuit inductor fabrication

Phillip D. Matz; Stephan Grunow; Satyavolu Srinivas Papa Rao

Archive | 2005

Single mask MIM capacitor and resistor with in trench copper drift barrier

Satyavolu Srinivas Papa Rao; Darius L. Crenshaw; Stephan Grunow; Kenneth D. Brennan; Somit Joshi; Montray Leavy; Phillip D. Matz; Sameer Kumar Ajmera; Yuri E. Solomentsev

Archive | 2004

Extraction of impurities in a semiconductor process with a supercritical fluid

Phillip D. Matz; Sameer Kumar Ajmera; Ju-Ai Ruan; Jinyoung Kim; Zhijian Lu; Laura M. Matz

Archive | 2005

Single lithography-step planar metal-insulator-metal capacitor and resistor

Phillip D. Matz; Sameer Kumar Ajmera; Darius L. Crenshaw

Archive | 2003

Damage-free resist removal process for ultra-low-k processing

Patricia B. Smith; Phillip D. Matz

Archive | 2004

Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect

Sameer Kumar Ajmera; Darius L. Crenshaw; Stephan Grunow; Satyavolu Srinivas Papa Rao; Phillip D. Matz

Archive | 2008

Method to prevent localized electrical open cu leads in vlsi cu interconnects

Sopa Chevacharoenkul; Phillip D. Matz

Explore More

Collaboration

Dive into the Phillip D. Matz's collaboration.

Top Co-Authors
Avatar

Sameer Kumar Ajmera

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Patricia B. Smith

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Satyavolu Srinivas Papa Rao

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Stephan Grunow

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Changming Jin

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Heungsoo Park

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Andrew J. McKerrow

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Darius L. Crenshaw

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Ju-Ai Ruan

Texas Instruments

View shared research outputs
Top Co-Authors
Avatar

Laura M. Matz

Texas Instruments

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge