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Qiwei Liang

Applied Materials

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Publication

Featured researches published by Qiwei Liang.

Archive | 2007

Process chamber for dielectric gapfill

Dmitry Lubomirsky; Qiwei Liang; Soonam Park; Kien N. Chuc; Ellie Yieh

Archive | 2008

Flowable dielectric equipment and processes

Dmitry Lubomirsky; Qiwei Liang; Jang Gyoo Yang

Archive | 2009

Remote plasma source seasoning

Soonam Park; Soo Jeon; Toan Q. Tran; Jang-Gyoo Yang; Qiwei Liang; Dmitry Lubomirsky

Archive | 1999

Temperature control system for process chamber

Dmitry Lubomirsky; Allen I. D'ambra; Edward L Floyd; Qiwei Liang; Daniel J. Hoffman; Victor H. Fuentes; Simon Yavelberg; Jerry C. Chen

Archive | 2010

Flow control features of cvd chambers

Kien N. Chuc; Qiwei Liang; Hanh D. Nguyen; Matthew L. Miller; Soonam Park; Toan Q. Tran; Adib Khan; Jang-Gyoo Yang; Dmitry Lubomirsky; Shankar Venkataraman

Archive | 2011

Semiconductor processing system and methods using capacitively coupled plasma

Jang-Gyoo Yang; Matthew L. Miller; Kien N. Chuc; Qiwei Liang; Shankar Venkataraman; Dmitry Lubomirsky

Archive | 2006

In-situ process state monitoring of chamber

Soonam Park; Qiwei Liang; Zhong Qiang; Dmitry Lubomirsky; Young S. Lee

Archive | 2013

Chemical control features in wafer process equipment

Qiwei Liang; Kien N. Chuc; Dimitry Lubomirsky; Soonam Park; Jang-Gyoo Yang; Shankar Venkataraman; Toan Tran; Kimberly Hinckley; Saurabh Garg

Archive | 2007

Internal balanced coil for inductively coupled high density plasma processing chamber

Robert T. Chen; Canfeng Lai; Weiyi Luo; Zhong Qiang Hua; Siqing Lu; Muhammad Rasheed; Qiwei Liang; Dmitry Lubomirsky; Ellie Yieh

Archive | 2000

Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer

Daniel J. Hoffman; Peter K. Loewenhardt; Victor H. Fuentes; Qiwei Liang

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Collaboration

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Dmitry Lubomirsky

Applied Materials

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Soonam Park

Applied Materials

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Ellie Yieh

Applied Materials

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Kien N. Chuc

Applied Materials

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Jang-Gyoo Yang

Applied Materials

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Jang Gyoo Yang

Applied Materials

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Matthew L. Miller

Applied Materials

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Shankar Venkataraman

Applied Materials

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Adib Khan

Applied Materials

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Canfeng Lai

Applied Materials

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