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Ralf Stuetzle

Carl Zeiss AG

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Publication

Featured researches published by Ralf Stuetzle.

Archive | 2007

Collector for an illumination system

Ralf Stuetzle; Udo Dinger

Archive | 2010

ILLUMINATION OPTICS FOR MICROLITHOGRAPHY

Martin Endres; Ralf Stuetzle; Jens Ossmann

Archive | 2007

Catoptric illumination system for microlithography tool

Jens Ossmann; Martin Endres; Ralf Stuetzle

Archive | 2009

Illuminating optic for euv microlithography

Guenther Dengel; Gero Wittich; Udo Dinger; Ralf Stuetzle; Martin Endres; Jens Ossmann; Berndt Warm

Archive | 2009

Illuminating optical unit and projection exposure apparatus for microlithography

Martin Endres; Jens Ossmann; Ralf Stuetzle

Archive | 2010

Illumination optics for EUV microlithography and related system and apparatus

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stuetzle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2011

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY

Guenther Dengel; Gero Wittich; Udo Dinger; Ralf Stuetzle; Martin Endres; Jens Ossmann; Berndt Warm

Archive | 2012

ILLUMINATION OPTICAL UNIT FOR MICROLITHOGRAPHY

Damian Fiolka; Ralf Stuetzle

Archive | 2010

Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus

Ralf Stuetzle; Martin Endres; Jens Ossmann; Michael Layh

Archive | 2008

ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY

Jens Ossmann; Martin Endres; Ralf Stuetzle

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Martin Endres

Carl Zeiss AG

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Jens Ossmann

Carl Zeiss AG

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Udo Dinger

Carl Zeiss AG

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Berndt Warm

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Gero Wittich

Carl Zeiss AG

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Guenther Dengel

Carl Zeiss AG

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Michael Layh

Carl Zeiss AG

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Christian Steigerwald

Carl Zeiss AG

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Holger Weigand

Carl Zeiss AG

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