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Jens Ossmann

Carl Zeiss AG

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Publication

Featured researches published by Jens Ossmann.

Archive | 2009

Beleuchtungsoptik für die EUV-Mikrolithographie

Martin Endres; Ralf Stützle; Jens Ossmann

Archive | 2009

Illumination optics for euv microlithography and illumination system and projection exposure apparatus comprising an illumination optics of this type

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stützle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2007

ILLUMINATION SYSTEM FOR A PROJECTION EXPOSURE APPARATUS WITH WAVELENGTHS LESS THAN OR EQUAL TO 193 nm

Martin Endres; Jens Ossmann

Archive | 2007

Beleuchtungssystem für eine Projektionsbelichtungsanlage mit Wellenlängen < 193 nm

Martin Endres; Jens Ossmann

Archive | 2014

Illumination system for EUV lithography

Martin Endres; Jens Ossmann

Archive | 2010

ILLUMINATION OPTICS FOR MICROLITHOGRAPHY

Martin Endres; Ralf Stuetzle; Jens Ossmann

Archive | 2006

Projection exposure equipment for microlithography, has illuminating optical unit for illuminating object field in object plane and correction screen is arranged in or adjacent to aperture diaphragm plane of projection optical unit

Martin Endres; Jens Ossmann; Ralf Stützle

Archive | 2007

Catoptric illumination system for microlithography tool

Jens Ossmann; Martin Endres; Ralf Stuetzle

Archive | 2009

Illuminating optic for euv microlithography

Guenther Dengel; Gero Wittich; Udo Dinger; Ralf Stuetzle; Martin Endres; Jens Ossmann; Berndt Warm

Archive | 2007

ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY AS WELL AS A FIRST AND SECOND OPTICAL ELEMENT FOR USE IN AN ILLUMINATION SYSTEM OF THIS TYPE

Martin Endres; Jens Ossmann

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Martin Endres

Carl Zeiss AG

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Ralf Stützle

Carl Zeiss AG

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Ralf Stuetzle

Carl Zeiss AG

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Berndt Warm

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Christian Steigerwald

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Ralf Scharnweber

Carl Zeiss AG

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Udo Dinger

Carl Zeiss AG

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Michael Layh

Carl Zeiss AG

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