Thomas D. Steiger
Cymer, Inc.
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Publication
Featured researches published by Thomas D. Steiger.
Emerging Lithographic Technologies IX | 2005
Vladimir B. Fleurov; P. C. Oh; Thomas D. Steiger; I. F. Fomenkov; William N. Partlo
Development of a drive laser with sufficient output power, high beam quality, and economical cost of consumables is critical to the successful implementation of a laser-produced plasma (LPP) EUV source for HVM applications. Cymer has conducted research on a number of solutions to this critical need. We report our progress on development of a high power system using two gas-discharge power amplifiers and repetition rates exceeding 10 kHz to produce more than 2kW output power with high beam quality. We provide optical performance data and design features of the drive laser as well as a path to output power scaling to meet high volume manufacturing requirements
Archive | 2001
Christian J. Wittak; William N. Partlo; Richard L. Sandstrom; Paul C. Melcher; David M. Johns; Robert B. Saethre; Richard M. Ness; Curtis L. Rettig; Robert A. Shannon; Richard C. Ujazdowski; Shahryar Rokni; Scott T. Smith; Stuart L. Anderson; John M Algots; Ronald L. Spangler; Igor V. Fomenkov; Thomas D. Steiger; Jerome A. Emilo; Clay C. Titus; Alex P. Ivaschenko; Paolo Zambon; Gamaralalage G. Padmabandu; Mark S. Branham; Sunjay Phatak; Raymond F. Cybulski
Archive | 2002
Richard G. Morton; Timothy S. Dyer; Thomas D. Steiger; Richard C. Ujazdowski; Tom A. Watson; Bryan G. Moosman; Alex P. Ivaschenko; Walter D. Gillespie; Curtis L. Rettig
Archive | 2004
Thomas D. Steiger; Joshua C. Brown; Thomas P. Duffey; Walter D. Gillespie; Richard G. Morton
Archive | 2006
Richard C. Ujazdowski; Richard M. Ness; J. Martin Algots; Vladimir B. Fleurov; Frederick A. Palenschat; Walter D. Gillespie; Bryan G. Moosman; Thomas D. Steiger; Brett D. Smith; Thomas E. McKelvey
Archive | 2005
Thomas D. Steiger; Edward P. Holtaway; Bryan G. Moosman; Rajasekhar M. Rao
Archive | 2005
William N. Partlo; Yoshiho Amada; James A Carmichael; Timothy S. Dyer; Walter D. Gillespie; Bryan G. Moosman; Richard G. Morton; Curtis L. Rettig; Brian D Strate; Thomas D. Steiger; Fedor Trintchouk; Richard C. Ujazdowski
Archive | 2007
Thomas D. Steiger; William N. Partlo
Archive | 2007
Yoshiho Amada; Thomas D. Steiger; Richard C. Ujazdowski
Archive | 2005
Walter D. Gillespie; Thomas D. Steiger; Richard C. Ujazdowski; William N. Partlo
