Robert A. Huertas | Researchain

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Featured researches published by Robert A. Huertas.

Archive | 2001

Method of forming low resistance vias

Minh Van Ngo; Robert A. Huertas; Drawn Hopper

Archive | 1999

Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer

Daniel Vincent Rowland; Robert A. Huertas; Norein Narendra Patel

Archive | 2000

H2-or H2/N2-plasma treatment to prevent organic ILD degradation

Minh Van Ngo; Dawn M. Hopper; Robert A. Huertas

Archive | 2004

UV-BLOCKING LAYER FOR REDUCING UV-INDUCED CHARGING OF SONOS DUAL-BIT FLASH MEMORY DEVICES IN BEOL PROCESSING

Minh Van Ngo; Tazrien Kamal; Mark T. Ramsbey; Arvind Halliyal; Jaeyong Park; Ning Cheng; Jeff P. Erhardt; Clarence Ferguson; Jeffrey A. Shields; Angela T. Hui; Robert A. Huertas; Tyagamohan Gottipati

Archive | 2006

Cu annealing for improved data retention in flash memory devices

Lu You; Alexander H. Nickel; Minh Quoc Tran; Minh-Van Ngo; Hieu Pham; Erik Wilson; Hirokazu Tokuno; Amir H. Jafarpour; Inkuk Kang; Robert A. Huertas

Archive | 2006

Conformal liner for gap-filling

Erik Wilson; Minh-Van Ngo; Hieu Pham; Robert A. Huertas; Lu You; Hirokazu Tokuno; Alexander H. Nickel; Minh Quoc Tran

Archive | 2000

Method of improving adhesion of capping layers to cooper interconnects

Minh Van Ngo; Lu You; Robert A. Huertas; Ercan Adem

Archive | 2003

UV-blocking layer for reducing UV-induced charging of SONOS dual-bit flash memory devices in BEOL

Minh Van Ngo; Tazrien Kamal; Mark T. Ramsbey; Arvind Halliyal; Jaeyong Park; Ning Cheng; Jeff P. Erhardt; Clarence Ferguson; Jeffrey A. Shields; Angela T. Hui; Robert A. Huertas; Tyagamohan Gottipati

Archive | 2000