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Thomas J. Sonderman

Advanced Micro Devices

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Publication

Featured researches published by Thomas J. Sonderman.

Archive | 2001

Method and apparatus for utilizing integrated metrology data as feed-forward data

Thomas J. Sonderman; Alexander J. Pasadyn; Christopher A. Bode

Archive | 2000

Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication

Anthony J. Toprac; Michael L. Miller; Thomas J. Sonderman

Archive | 2002

Dynamic process state adjustment of a processing tool to reduce non-uniformity

Thomas J. Sonderman; Alexander J. Pasadyn; Christopher A. Bode

Archive | 2000

Method and apparatus for implementing corrected species by monitoring specific state parameters

Elfido Coss; Thomas J. Sonderman; Robert W. Anderson

Archive | 2001

Method and apparatus for determining output characteristics using tool state data

Alexander J. Pasadyn; Thomas J. Sonderman

Archive | 2000

Method and apparatus for using equipment state data for run-to-run control of manufacturing tools

Michael L. Miller; Thomas J. Sonderman

Archive | 1999

Method for filling trenches

William Jarrett Campbell; H. Jim Fulford; Christopher H. Raeder; Craig W. Christian; Thomas J. Sonderman

Archive | 1999

Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework

Thomas J. Sonderman; Elfido Coss; Qingsu Wang

Archive | 2002

Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters

Alexander J. Pasadyn; Thomas J. Sonderman

Archive | 2002

Dynamic targeting for a process control system

Alexander J. Pasadyn; Thomas J. Sonderman; Jin Wang

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Alexander J. Pasadyn

University of Texas at Austin

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Christopher A. Bode

Advanced Micro Devices

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Anthony J. Toprac

Advanced Micro Devices

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Michael L. Miller

Advanced Micro Devices

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Anastasia Oshelski Peterson

Advanced Micro Devices

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Joyce S. Oey Hewett

Advanced Micro Devices

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Craig W. Christian

Advanced Micro Devices

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Richard J. Markle

Advanced Micro Devices

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Jin Wang

Auburn University

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William Jarrett Campbell

Advanced Micro Devices

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