Ronald A. Warren

Process for fabricating self-aligned contact studs for semiconductor structures

Apparatus for uniform cleaning of wafers using megasonic energy

Method for uniform cleaning of wafers using megasonic energy

Wear-through detector for multilayered parts and methods of using same

Self-aligned contact studs for semiconductor structures

Antireflective polyimide dielectric for photolithography

Process for fabrication of a semiconductor structure and contact stud

Method for extended ion implanter source lifetime with control mechanism

Structure and method for detection of physical interference during transport of an article

Enhanced collimated sputtering apparatus and its method of use