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Russell Hudyma

Carl Zeiss AG

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Publication

Featured researches published by Russell Hudyma.

Archive | 2003

Projection objectives including a plurality of mirrors with lenses ahead of mirror M3

Hans-Juergen Mann; Russell Hudyma; Alexander Epple

Archive | 1999

High numerical aperture ring field projection system for extreme ultraviolet lithography

Russell Hudyma; David R. Shafer

Archive | 2004

Projection objectives including a plurality of curved mirrors with lenses ahead of the last but one mirror

Hans-Juergen Mann; Alexander Epple; Russell Hudyma

Archive | 2001

Microlithographic reduction projection catadioptric objective

David Shafer; Russell Hudyma; Wilhelm Ulrich

Archive | 2003

Projection system for EUV lithography

Russell Hudyma; Hans-Jürgen Mann; Udo Dinger

Archive | 2004

Refractive projection objective

Hans-Juergen Rostalski; Karl-Heinz Schuster; Russell Hudyma; Wilhelm Ulrich; Rolf Freimann

Archive | 2002

Reflective projection lens for EUV-photolithography

Hans-Juergen Mann; Wilhelm Ulrich; Russell Hudyma

Archive | 2007

Catadioptric projection system for 157 nm lithography

Russell Hudyma

Archive | 2003

Refractive projection lens

Wilhelm Ulrich; Russell Hudyma; Hans-Juergen Rostalski; Karl-Heinz Schuster

Archive | 2002

Catadioptric multi-mirror systems for projection lithography

Russell Hudyma; Wilheim Ulrich

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Wilhelm Ulrich

Carl Zeiss AG

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Hans-Juergen Rostalski

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Hans-Juergen Mann

Carl Zeiss AG

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Hans-Jürgen Mann

Carl Zeiss AG

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Karl-Heinz Schuster

Carl Zeiss AG

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Hans-Jürgen Rostalski

Carl Zeiss AG

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David R. Shafer

University of California

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David Shafer

Carl Zeiss AG

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Hans Juergen Rostalski

Carl Zeiss AG

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