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Ryan Hanson

Applied Materials

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Publication

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Archive | 2011

MAGNETRON DESIGN FOR RF/DC PHYSICAL VAPOR DEPOSITION

Rongjun Wang; Sally Lou; Muhammad Rasheed; Jianxin Lei; Xianmin Tang; Srinivas Gandikota; Ryan Hanson; Tza-Jing Gung; Keith A. Miller; Thanh X. Nguyen

Archive | 2016

ONE-PIECE PROCESS KIT SHIELD

Kirankumar Savandaiah; Ryan Hanson; Ruxiao An

Archive | 2016

ELECTROSTATIC CHUCK DESIGN FOR HIGH TEMPERATURE RF APPLICATIONS

Ryan Hanson; Manjunatha Koppa; Vijay D. Parkhe; John C. Forster; Keith A. Miller

Archive | 2013

Substrate support with radio frequency (RF) return path

Vijay D. Parkhe; Ryan Hanson

Archive | 2016

AUTO CAPACITANCE TUNER CURRENT COMPENSATION TO CONTROL ONE OR MORE FILM PROPERTIES THROUGH TARGET LIFE

Zhenbin Ge; Vivek Gupta; Adolph Miller Allen; Ryan Hanson

Archive | 2015

Plateau de maintien électrostatique pour applications rf à haute température

Ryan Hanson; Manjunatha Koppa; Vijay D. Parkhe; John C. Forster; Keith A. Miller

Archive | 2015

Target profile for a physical vapor deposition chamber target

Ryan Hanson; Zhenbin Ge; Vivek Gupta

Archive | 2014

SELF-CENTERING PROCESS SHIELD

Ryan Hanson; Goichi Yoshidome; Nelson A. Yee

Archive | 2014

CONFIGURABLE VARIABLE POSITION CLOSED TRACK MAGNETRON

Alan Ritchie; Ryan Hanson; Xianwei Zhao

Archive | 2014

Magnétron de poursuite fermé à position variable configurable

Alan Ritchie; Ryan Hanson; Xianwei Zhao

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Keith A. Miller

Applied Materials

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Vijay D. Parkhe

Applied Materials

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Alan Ritchie

Applied Materials

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Goichi Yoshidome

Applied Materials

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John C. Forster

Applied Materials

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Manjunatha Koppa

Applied Materials

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Muhammad Rasheed

Applied Materials

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Vivek Gupta

Applied Materials

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Xianwei Zhao

Applied Materials

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Zhenbin Ge

Applied Materials

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