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Goichi Yoshidome

Applied Materials

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Publication

Featured researches published by Goichi Yoshidome.

Archive | 2006

Process kit and target for substrate processing chamber

Kathleen Scheible; Michael Allen Flanigan; Goichi Yoshidome; Adolph Miller Allen; Cristopher M. Pavloff

Archive | 2004

Compensation of spacing between magnetron and sputter target

Peijun Ding; Daniel C. Lubben; Ilyoung Richard Hong; Michael Miller; Hsien-Lung Yang; Suraj Rengarajan; Arvind Sundarrajan; Goichi Yoshidome

Archive | 2004

Mechanism for varying the spacing between sputter magnetron and target

Ilyoung Richard Hong; Donny Young; Michael Rosenstein; Robert B. Lowrance; Daniel C. Lubben; Michael Miller; Peijun Ding; Sreekrishnan Sankaranarayan; Goichi Yoshidome

Archive | 2007

SPUTTERING OF THERMALLY RESISTIVE MATERIALS INCLUDING METAL CHALCOGENIDES

Mengqi Ye; Keith A. Miller; Peijun Ding; Goichi Yoshidome; Rong Tao

Archive | 2007

Chalcogenide target and method

Mengqi Ye; Rong Tao; Hua Chung; Goichi Yoshidome; William Rhodes; Peijun Ding

Archive | 2005

Physical vapor deposition chamber having an adjustable target

Ilya Lavitsky; Michael Rosenstein; Goichi Yoshidome; Hougong Wang; Zhendong Liu; Mengqi Ye

Archive | 2005

Physical vapor deposition chamber having a rotatable substrate pedestal

Ilya Lavitsky; Michael Rosenstein; Goichi Yoshidome; Hougong Wang; Zhendong Liu; Mengqi Ye

Archive | 2012

EXTENDED LIFE TEXTURED CHAMBER COMPONENTS AND METHOD FOR FABRICATING SAME

Michael Jackson; Wendell G. Boyd; Tiong Khai Soo; William Ming-Ye Lu; Goichi Yoshidome; Joseph F. Sommers

Archive | 2008

GAP FILL IMPROVEMENT METHODS FOR PHASE-CHANGE MATERIALS

Mengqi Ye; Hua Chung; Goichi Yoshidome; Philip Fulmer

Archive | 2012

COOLING RING FOR PHYSICAL VAPOR DEPOSITION CHAMBER TARGET

Brian T. West; Goichi Yoshidome; Ralf Hofmann

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Adolph Miller Allen

Applied Materials

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Mengqi Ye

Applied Materials

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Michael Allen Flanigan

Applied Materials

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Peijun Ding

Applied Materials

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Michael Rosenstein

Applied Materials

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Christopher Redwood City Pavloff

Applied Materials

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Daniel C. Lubben

Applied Materials

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Donny Young

Applied Materials

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Ilyoung Richard Hong

Applied Materials

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Kathleen San Francisco Scheible

Applied Materials

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