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Alan Ritchie

Applied Materials

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Publication

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Archive | 2006

SPUTTERING TARGET FOR TITANIUM SPUTTERING CHAMBER

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible

Archive | 2006

Target for sputtering chamber

Alan Ritchie; Donny Young; Ilyoung Richard Hong; Kathleen Scheible; Umesh Kelkar

Archive | 2006

Process kit components for titanium sputtering chamber

Donny Young; Alan Ritchie; Ilyoung Richard Hong; Kathleen Scheible

Archive | 2011

Methods for depositing metal in high aspect ratio features

Alan Ritchie; Karl M. Brown; John Pipitone

Archive | 2007

Deposition processes for titanium nitride barrier and aluminum

Wei Ti Lee; Yen-Chih Wang; Mohd Fadzli Anwar Hassan; Ryeun Kwan Kim; Hyung Chul Park; Ted Guo; Alan Ritchie

Archive | 2011

Deposition Apparatus And Methods To Reduce Deposition Asymmetry

Alan Ritchie; Michael S. Cox

Archive | 2008

Densification process for titanium nitride layer for submicron applications

Alan Ritchie; Mohd Fadzil Anwar Hassan

Archive | 2006

UNIQUE PASSIVATION TECHNIQUE FOR A CVD BLOCKER PLATE TO PREVENT PARTICLE FORMATION

Alan Ritchie; Wei Ti Lee; Ted Guo

Archive | 2011

APPARATUS FOR PHYSICAL VAPOR DEPOSITION HAVING CENTRALLY FED RF ENERGY

Muhammad Rasheed; Lara Hawrylchak; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Alan Ritchie

Archive | 2013

PROCESS KIT FOR DEPOSITION AND ETCHING

John C. Forster; Zhenbin Ge; Alan Ritchie

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Donny Young

Applied Materials

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Muhammad Rasheed

Applied Materials

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Zhenbin Ge

Applied Materials

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Keith A. Miller

Applied Materials

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Ilyoung Richard Hong

Applied Materials

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Kathleen Scheible

Applied Materials

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Adolph Miller Allen

Applied Materials

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Kirankumar Savandaiah

Applied Materials

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Michael S. Cox

Applied Materials

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Ted Guo

Applied Materials

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