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Saburo Kamiya

Nikon

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Publication

Featured researches published by Saburo Kamiya.

Archive | 2000

Stage device and exposure apparatus

Tetsuo Taniguchi; Saburo Kamiya

Archive | 1998

STAGE DEVICE AND ALIGNER AND POSITIONING METHOD USING THE STAGE DEVICE

Saburo Kamiya; Tetsuo Taniguchi; 三郎 神谷; 哲夫 谷口

Archive | 1991

Method of and apparatus for measuring coordinate position and positioning an object

Akikazu Tanimoto; Saburo Kamiya

Archive | 1998

Method and apparatus for correcting linearity errors of a moving mirror and stage

Saburo Kamiya

Archive | 1997

Methods to control the environment and exposure apparatus

Saburo Kamiya; Naoyuki Kobayashi

Archive | 1988

Laser beam working system

Ikuo Hikima; Akira Miyaji; Saburo Kamiya; Akikazu Tanimoto

Archive | 1994

Optical measuring apparatus having a partitioning wall for dividing gas flow in an environmental chamber

Saburo Kamiya

Archive | 2004

Exposure apparatus and exposure method

Saburo Kamiya

Archive | 2001

Exposure apparatus, device manufacturing method and environmental control method of exposure apparatus

Yoshitomo Nagahashi; Saburo Kamiya; Koichi Katsura

Archive | 1995

Dual interferometer measuring system including a wavelength correction resulting from a variation in the refractive index

Saburo Kamiya

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Akikazu Tanimoto

Nikon

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Tetsuo Taniguchi

Murata Manufacturing

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Kiyoshi Uchikawa

Nikon

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Koichi Katsura

Nikon

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Yoshitomo Nagahashi

Nikon

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Akira Miyaji

Nikon

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Bausan Yuan

Nikon

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Ikuo Hikima

Nikon

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Masahiko Okumura

Nikon

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Michael R. Sogard

Nikon

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