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Samuel Chu-Chiang Hsu

Applied Materials

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Publication

Featured researches published by Samuel Chu-Chiang Hsu.

Archive | 2008

CARRIER HEAD USING FLEXURE RESTRAINTS FOR RETAINING RING ALIGNMENT

Jin Yi; Jeonghoon Oh; Hung Chih Chen; Samuel Chu-Chiang Hsu

Archive | 2011

Substrate edge tuning with retaining ring

Hung Chih Chen; Samuel Chu-Chiang Hsu; Yin Yuan; Huanbo Zhang; Gautam Shashank Dandavate; Mario David Silvetti

Archive | 2016

Retaining Ring Having Inner Surfaces with Facets

Jeonghoon Oh; Steven M. Zuniga; Andrew J. Nagengast; Samuel Chu-Chiang Hsu; Gautam Shashank Dandavate

Archive | 2013

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD

Hung Chih Chen; Samuel Chu-Chiang Hsu; Yin Yuan; Huanbo Zhang; Gautam Shashank Dandavate

Archive | 2015

RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS

Hung Chih Chen; Samuel Chu-Chiang Hsu; Gautam Shashank Dandavate

Archive | 2011

Carrier head with narrow inner ring and wide outer ring

Hung Chih Chen; Samuel Chu-Chiang Hsu; Yin Yuan; Huanbo Zhang; Gautam Shashank Dandavate

Archive | 2014

Substrate precession mechanism for cmp polishing head

Chih Hung Chen; Gautam Shashank Dandavate; Jayakumar Gurusamy; Samuel Chu-Chiang Hsu

Archive | 2014

Configurable pressure design for multizone chemical mechanical planarization polishing head

Jeonghoon Oh; Steven M. Zuniga; Andrew J. Nagengast; Samuel Chu-Chiang Hsu; Gautam Shashank Dandavate

Archive | 2013

Anneau de rétention avec rigidité et épaisseur choisies

Hung Chih Chen; Samuel Chu-Chiang Hsu; Gautam Shashank Dandavate

Archive | 2011

Substratkantenbearbeitung mit einem haltering

Hung Chih Chen; Samuel Chu-Chiang Hsu; Yin Yuan; Huanbo Zhang; Gautam Shashank Dandavate; Mario David Silvetti

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Gautam Shashank Dandavate

Applied Materials

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Hung Chih Chen

Applied Materials

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Jeonghoon Oh

Applied Materials

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Andrew J. Nagengast

Applied Materials

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Steven M. Zuniga

Applied Materials

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Denis M. Koosau

Applied Materials

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Jin Yi

Applied Materials

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