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Steven M. Zuniga

Applied Materials

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Publication

Featured researches published by Steven M. Zuniga.

Archive | 1997

Carrier head with a flexible membrane for a chemical mechanical polishing system

Steven M. Zuniga; Manoocher Birang; Hung Chen; Sen-Hou Ko

Archive | 1996

Carrier head design for a chemical mechanical polishing apparatus

Steven M. Zuniga; Stephen J. Blumenkranz

Archive | 2000

Closed-loop control of wafer polishing in a chemical mechanical polishing system

Steven M. Zuniga; Manoocher Birang

Archive | 1998

Carrier head for chemical mechanical polishing a substrate

Steven M. Zuniga; Hung Chen; Manoocher Birang

Archive | 1997

Carrier head with a substrate detection mechanism for a chemical mechanical polishing system

Boris Govzman; Steven M. Zuniga; Hung Chen; Sasson Somekh

Archive | 1999

Carrier head with a multilayer retaining ring for chemical mechanical polishing

Steven M. Zuniga; Thomas H. Osterheld; Lawrence M. Rosenberg

Archive | 2000

Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus

Hung Chen; Steven M. Zuniga

Archive | 1998

Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus

Hung Chen; Steven M. Zuniga

Archive | 2000

Carrier head for chemical mechanical polishing

Steven M. Zuniga; Hung Chen

Archive | 2002

Carrier head with local pressure control for a chemical mechanical polishing apparatus

Steven M. Zuniga; Hung Chih Chen; Manoocher Birang; Kapila Wijekoon; Sen-Hou Ko

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Hung Chih Chen

Applied Materials

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Hung Chen

Applied Materials

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Jeonghoon Oh

Applied Materials

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Manoocher Birang

Applied Materials

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Andrew J. Nagengast

Applied Materials

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Sen-Hou Ko

Applied Materials

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Charles C. Garretson

Applied Materials

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Thomas H. Osterheld

Applied Materials

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Aden Martin Allen

Applied Materials

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Douglas R. Mcallister

Applied Materials

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