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Sasago Masaru

Panasonic

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Publication

Featured researches published by Sasago Masaru.

Archive | 2004

COMPOSITION FOR FORMING POROUS FILM, POROUS FILM AND ITS MANUFACTURING METHOD, INTERLAYER INSULATION FILM, AND SEMICONDUCTOR DEVICE

Hamada Yoshitaka; Yagihashi Fujio; Nakagawa Hideo; Sasago Masaru

Archive | 2004

Composition for forming porous film, porous film and its manufacturing process, interlayer dielectrics and semiconductor device

Ogihara Tsutomu; Yagihashi Fujio; Hamada Yoshitaka; Asano Takeshi; Iwabuchi Motoaki; Nakagawa Hideo; Sasago Masaru

Archive | 2003

HIGH MOLECULAR WEIGHT COMPOUND, RESISIT MATERIAL AND METHOD FOR FORMING PATTERN

Endo Masayuki; Harada Yuji; Hatakeyama Jun; Kawai Yoshio; Kishimura Shinji; Maeda Kazuhiko; Miyazawa Satoru; Ootani Michitaka; Sasago Masaru; Tsutsumi Kentaro

Archive | 2004

ZEOLITE SOL, METHOD OF MANUFACTURING THE SAME, COMPOSITION FOR FORMING POROUS FILM, POROUS FILM AND METHOD OF MANUFACTURING THE SAME, INTERLAYER INSULATION FILM AND SEMICONDUCTOR DEVICE

Ogihara Tsutomu; Yagihashi Fujio; Nakagawa Hideo; Sasago Masaru

Archive | 2005

Semiconductor device producing method

Nakagawa Hideo; Sasago Masaru; Hirai Yoshihiko

Archive | 2005

SULFONAMIDE COMPOUND COMPRISING SPECIFIC REPEATING UNIT, POLYMER COMPOUND COMPRISING THE SAME AS MONOMERS, RESIST MATERIAL COMPRISING POLYMER AS BASE RESIN, AND PATTERN FORMATION METHOD USING RESIST MATERIAL

Endo Masayuki; Fukuhara Toshiaki; Imori Hirokazu; Kishimura Shinji; Sasago Masaru; Ueda Mitsuru

Archive | 2012

Porous-film-forming composition, preparation metho

Ogihara Tsutomu; Yagihashi Fujio; Hamada Yoshitaka; Asano Takeshi; Iwabuchi Motoaki; Sasago Masaru; Nakagawa Hideo

Archive | 2011

Poröse filmbildende Zusammensetzung, Verfahren zur Herstellung dieser Zusammensetzung, poröser Film und Halbleiterbauelement

Ogihara Tsutomu; Yagihashi Fujio; Hamada Yoshitaka; Asano Takeshi; Iwabuchi Motoaki; Sasago Masaru; Nakagawa Hideo

Archive | 2010

ZUSAMMENSETZUNG ZUR BILDUNG EINES PORÖSENFILMS, PORÖSER FILM, HERSTELLVERFAHREN DAFÜR, ZWISCHENSCHICHTISOLIERFILM UND HALBLEITERVORRICHTUNG

Iwabuchi M; Yagihashi F; Hamada Y; Nakagawa Hideo; Sasago Masaru

Archive | 2009

Pattern formation method and exposure device

Endo Masayuki; Sasago Masaru

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Endo Masayuki

Panasonic

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Kishimura Shinji

Panasonic

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Hatakeyama Jun

Shin-Etsu Chemical

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Nakagawa Hideo

Panasonic

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Asano Takeshi

Shin-Etsu Chemical

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Iwabuchi Motoaki

Shin-Etsu Chemical

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Ogihara Tsutomu

Shin-Etsu Chemical

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Urano Fumiyoshi

Panasonic

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Yagihashi Fujio

Shin-Etsu Chemical

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Fukuhara Toshiaki

Panasonic

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