Hatakeyama Jun | Researchain

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Featured researches published by Hatakeyama Jun.

Archive | 2015

Positive resist material and pattern forming method using the same

Hatakeyama Jun; Hasegawa Koji

Archive | 1999

New lactone-containing compound, high polymeric compound, resist material and pattern formation

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Hatakeyama Jun; Watanabe Osamu

Archive | 2002

High molecular compound, resist material and pattern forming method

Hatakeyama Jun; Takahashi Toshiaki; Watanabe Atsushi; Ishihara Toshinobu; Sasako Masaru; Endo Masataka; Kishimura Shinji; Otani Mitsutaka; Miyazawa Satoru; Tsutsumi Kentaro; Maeda Kazuhiko

Archive | 2009

Positive resist material and patterning process using the same

Hatakeyama Jun; Hasegawa Koji; Tachibana Seiichiro

Archive | 2002

Basic compound, resist material and pattern-forming method

Hatakeyama Jun; Watanabe Takeshi; Nagata Takashi; Maeda Kazunori; Nishi Tsunehiro

Archive | 2004

Patterning method and resist overcoat material to be used for the same

Hatakeyama Jun; Harada Yuji

Archive | 2002

High polymer compound, resist material and pattern- forming method

Hatakeyama Jun; Harada Yuji; Watanabe Atsushi; Sasako Masaru; Endo Masataka; Kishimura Shinji; Otani Mitsutaka; Miyazawa Satoru; Tsutsumi Kentaro; Maeda Kazuhiko

Archive | 2001