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Satoru Fushimi

Hitachi

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Publication

Featured researches published by Satoru Fushimi.

Archive | 1985

Method of and apparatus for checking geometry of multi-layer patterns for IC structures

Shunji Maeda; Hitoshi Kubota; Satoru Fushimi; Hiroshi Makihira; Takanori Ninomiya; Yasuo Nakagawa

Archive | 1989

Apparatus and method of pattern detection based on a scanning transmission electron microscope

Hiroya Koshishiba; Satoru Fushimi; Yasuo Nakagawa; Kozo Nakahata

Archive | 1984

Method of detecting pattern defect and its apparatus

Yasuhiko Hara; Yoshimasa Ohshima; Satoru Fushimi; Hiroshi Makihira

Archive | 1982

Pattern detection system

Yasuhiko Hara; Nobuyuki Akiyama; Satoru Fushimi; Yoshimasa Oshima; Nobuhiko Aoki

Archive | 1987

Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure

Satoru Fushimi; Yasuo Nakagawa; Asahiro Kuni; Hitoshi Kubota; Hiroya Koshishiba

Archive | 1989

Chipping detection system and method

Shunji Maeda; Hitoshi Kubota; Satoru Fushimi; Takashi Hiroi

Journal of The Japan Society for Precision Engineering | 1993

Automatic Solder Joint Inspection System by X-ray Imaging.

Toshimitsu Hamada; Kozo Nakahata; Satoru Fushimi; Yoshifumi Morioka; Takehiko Nishida

Archive | 1987

Mask pattern defect detection apparatus

Satoru Fushimi; Yasuo Nakagawa; Asahiro Kuni; Hitoshi Kubota; Hiroya Koshishiba

Archive | 1987

Pattern defect detection apparatus using scanning and transmission electron microscope

Satoru Fushimi; Yasuo Nakagawa; Asahiro Kuni; Hitoshi Kubota; Hiroya Koshishiba

Electronics and Communications in Japan Part Ii-electronics | 1987

Automating inspection of aluminum circuit pattern of LSI wafers

Yasuhiko Hara; Satoru Fushimi; Yoshimasa Ooshima; Hitoshi Kubota

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Hitoshi Kubota

Hitachi

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Yasuo Nakagawa

Hitachi

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Hiroya Koshishiba

Hitachi

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Asahiro Kuni

Hitachi

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Hiroshi Makihira

Hitachi

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Shunji Maeda

Hitachi

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Takanori Ninomiya

Hitachi

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Yasuhiko Hara

Hitachi

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Kozo Nakahata

Hitachi

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Nobuhiko Aoki

Hitachi

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