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Publication
Featured researches published by Satyanarayana V. Nitta.
international interconnect technology conference | 2008
Satyanarayana V. Nitta; Daniel C. Edelstein; Shom Ponoth; Lawrence A. Clevenger; Xio Hu Liu; Theodorus E. Standaert
In this paper we present new modeling and measured data to address detailed performance and reliability considerations of multi-level airgaps. Using finite element modeling, we analyzed the capacitance distributions in the airgaps while restricting openings in the cap layers for increased mechanical and electrical reliability. Despite this restriction, capacitance reductions can be maximized by expanding the gap in the low-k SiCOH dielectric underneath the cap, and by increasing gap depth. Relevant BEOL simulation, performance and reliability data has been obtained and will be presented in this context
Archive | 2002
Alfred Grill; Jeffrey C. Hedrick; Christopher V. Jahnes; Satyanarayana V. Nitta; Kevin S. Petrarca; Sampath Purushothaman; Katherine L. Saenger; Stanley Joseph Whitehair
Archive | 2000
Alfred Grill; Jeffrey C. Hedrick; Christopher V. Jahnes; Satyanarayana V. Nitta; Kevin S. Petrarca; Sampath Purushothaman; Katherine L. Saenger; Stanley Joseph Whitehair
Archive | 2002
Matthew E. Colburn; Elbert E. Huang; Satyanarayana V. Nitta; Sampath Purushothaman; Katherine L. Saenger
Archive | 2004
Nirupama Chakrapani; Matthew E. Colburn; Christos D. Dimitrakopoulos; Dirk Pfeiffer; Sampath Purushothaman; Satyanarayana V. Nitta
Archive | 2007
Daniel C. Edelstein; Matthew E. Colburn; Edward C. Cooney; Timothy J. Dalton; John A. Fitzsimmons; Jeffrey P. Gambino; Elbert E. Huang; Michael Lane; Vincent J. McGahay; Lee M. Nicholson; Satyanarayana V. Nitta; Sampath Purushothaman; Sujatha Sankaran; Thomas M. Shaw; Andrew H. Simon; Anthony K. Stamper
Archive | 2002
Timothy J. Dalton; Stephen E. Greco; Jeffrey C. Hedrick; Satyanarayana V. Nitta; Sampath Purushothaman; Kenneth P. Rodbell; Robert Rosenberg
Archive | 2012
Daniel C. Edelstein; David V. Horak; Elbert E. Huang; Satyanarayana V. Nitta; Takeshi Nogami; Shom Ponoth; Terry A. Spooner
Archive | 2001
Stephen M. Gates; Christopher B. Murray; Satyanarayana V. Nitta; Sampath Purushothaman
Archive | 2008
Matthew E. Colburn; Stephen M. Gates; Jeffrey C. Hedrick; Elbert E. Huang; Satyanarayana V. Nitta; Sampath Purushothaman; Muthumanickam Sankarapandian
