Scott C. Burkhart

National Ignition Facility system alignment

The National Ignition Facility (NIF) is the worlds largest optical instrument, comprising 192 37 cm square beams, each generating up to 9.6 kJ of 351 nm laser light in a 20 ns beam precisely tailored in time and spectrum. The Facility houses a massive (10 m diameter) target chamber within which the beams converge onto an ∼1 cm size target for the purpose of creating the conditions needed for deuterium/tritium nuclear fusion in a laboratory setting. A formidable challenge was building NIF to the precise requirements for beam propagation, commissioning the beam lines, and engineering systems to reliably and safely align 192 beams within the confines of a multihour shot cycle. Designing the facility to minimize drift and vibration, placing the optical components in their design locations, commissioning beam alignment, and performing precise system alignment are the key alignment accomplishments over the decade of work described herein. The design and positioning phases placed more than 3000 large (2.5 m×2 m×1 m) line-replaceable optics assemblies to within ±1 mm of design requirement. The commissioning and alignment phases validated clear apertures (no clipping) for all beam lines, and demonstrated automated laser alignment within 10 min and alignment to target chamber center within 44 min. Pointing validation system shots to flat gold-plated x-ray emitting targets showed NIF met its design requirement of ±50 μm rms beam pointing to target chamber. Finally, this paper describes the major alignment challenges faced by the NIF Project from inception to present, and how these challenges were met and solved by the NIF design and commissioning teams.

Alignment and wavefront control systems of the National Ignition Facility

The National Ignition Facility (NIF) at the Lawrence Livermore National Laboratory is a stadium-sized facility containing a 192-beam Nd glass laser. Its 1.053-µm output is frequency converted to produce 1.8-MJ, 500-TW pulses in the ultraviolet. Refer to the companion overview articles in this issue for more information. High-energy-density and inertial confinement fusion physics experiments require the ability to precisely align and focus pulses with single-beam energy up to 20 KJ and durations of a few nanoseconds onto millimeter-sized targets. NIFs alignment control system now regularly provides automatic alignment of the four commissioned beams prior to every NIF shot in approximately 45 min, and speed improvements are being implemented. NIF utilizes adaptive optics for wavefront control, which significantly improves the ability to tightly focus each laser beam onto a target. Multiple sources of both static and dynamic aberration are corrected. This article provides an overview of the NIF automatic alignment and wavefront control systems, and provides data to show that the facility is expected to meet its primary requirements to position beams on the target with an accuracy of 50-µm rms over the 192 beams and to focus the pulses into a 600-µm spot.

The injection laser system on the National Ignition Facility

The National Ignition Facility (NIF) is currently the largest and most energetic laser system in the world. The main amplifiers are driven by the Injection Laser System comprised of the master oscillators, optical preamplifiers, temporal pulse shaping and spatial beam formatting elements and injection diagnostics. Starting with two fiber oscillators separated by up to a few angstroms, the pulse is phase modulated to suppress SBS and enhance spatial smoothing, amplified, split into 48 individual fibers, and then temporally shaped by an arbitrary waveform generator. Residual amplitude modulation induced in the preamplifiers from the phase modulation is also pre-compensated in the fiber portion of the system before it is injected into the 48 pre-amplifier modules (PAMs). Each of the PAMs amplifies the light from the 1 nJ fiber injection up to the multi-joule level in two stages. Between the two stages the pre-pulse is suppressed by 60 dB and the beam is spatially formatted to a square aperture with pre-compensation for the nonuniform gain profile of the main laser. The input sensor package is used to align the output of each PAM to the main laser and acquire energy, power, and spatial profiles for all shots. The beam transport sections split the beam from each PAM into four main laser beams (with optical isolation) forming the 192 beams of the NIF. Optical, electrical, and mechanical design considerations for long term reliability and availability will be discussed. Work performed under the auspices of the U. S. Department of Energy under contract W-7405-Eng-48.

Three-Dimensional Hydrodynamic Experiments on the National Ignition Facility

The production of supersonic jets of material via the interaction of a strong shock wave with a spatially localized density perturbation is a common feature of inertial confinement fusion and astrophysics. The behavior of two-dimensional (2D) supersonic jets has previously been investigated in detail [J. M. Foster et. al, Phys. Plasmas 9, 2251 (2002)]. In three-dimensions (3D), however, there are new aspects to the behavior of supersonic jets in compressible media. In this paper, the commissioning activities on the National Ignition Facility (NIF) [J. A. Paisner et al., Laser Focus World 30, 75 (1994)] to enable hydrodynamic experiments will be presented as well as the results from the first series of hydrodynamic experiments. In these experiments, two of the first four beams of NIF are used to drive a 40 Mbar shock wave into millimeter scale aluminum targets backed by 100 mg/cc carbon aerogel foam. The remaining beams are delayed in time and are used to provide a point-projection x-ray backlighter source for diagnosing the three-dimensional structure of the jet evolution resulting from a variety of 2D and 3D features. Comparisons between data and simulations using several codes will be presented.

National Ignition Facility commissioning and performance

The National Ignition Facility at LLNL recently commissioned the first set of four beam lines into the target chamber. This effort, called NIF Early Light, demonstrated the entire laser system architecture from master oscillator through the laser amplifiers and final optics to target and initial X-ray diagnostics. This paper describes the major installation and commissioning steps for one of NIFs 48 beam quads. Using a dedicated single beam line Precision Diagnostic System, performance was explored over the entire power versus energy space up to 6.4 TW/beam for sub-nanosecond pulses and 25 kJ/beam for 23 ns pulses at 1w. NEL also demonstrated frequency converted Nd:Glass laser energies from a single beamline of 11.3 kJ at 2w and 10.4 kJ at 3w.

Frequency converter development for the National Ignition Facility

The design of the NIF incorporates a type I/type II third harmonic generator to convert the 1.053-micrometers fundamental wavelength of the laser amplifier to a wavelength of 0.351 micrometers for target irradiation. To understand and control the tolerances in the converter design, we have developed a comprehensive error budget that accounts for effects that are known to influence conversion efficiency, including variations in amplitude and phase of the incident laser pulse, temporal bandwidth of the incident laser pulse, crystal surface figure and bulk non-uniformities, angular alignment errors, Fresnel losses, polarization errors and crystal temperature variations. The error budget provides specifications for the detailed design of the NIF final optics assembly and the fabrication of optical components. Validation is accomplished through both modeling and measurement, including full-scale Beamlet tests of a 37-cm aperture frequency converter in a NIF prototype final optics cell. The prototype cell incorporates full-perimeter clamping to support the crystals, and resides in a vacuum environment as per the NIF design.

National Ignition Facility alignment and wavefront control

The National Ignition Facility (NIF) at the Lawrence Livermore National Laboratory is a stadium-sized facility containing a 192-beam, 1.8-Megajoule, 500-Terawatt, ultraviolet laser system. High-energy-density and inertial confinement fusion physics experiments require the ability to precisely align and focus pulses with single beam energy up to 20KJ in a few nanoseconds onto mm-sized targets. NIFs alignment control system now regularly provides automatic alignment of the four commissioned beams prior to every NIF shot in approximately 45min., and speed improvements are being implemented. NIF utilizes adaptive optics for wavefront control, which significantly improves the ability to tightly focus each laser beam onto a target. Multiple sources of both static and dynamic aberration are corrected. This presentation provides an overview of the NIF Automatic Alignment and Wavefront Control Systems including the accuracy and target spot size performance achieved.

Extreme Ultraviolet Lithography - Reflective Mask Technology

EUVL mask blanks consist of a distributed Bragg reflector made of 6.7 nm-pitch bi-layers of Mo and Si deposited upon a precision Si or glass substrate. The layer deposition process has been optimized for low defects, by application of a vendor-supplied but highly modified ion-beam sputter deposition system. This system is fully automated using SMIF technology to obtain the lowest possible environmental- and handling-added defect levels. Originally designed to coat 150 mm substrates, it was upgraded in July 1999 to 200 mm and has coated runs of over 50 substrates at a time with median added defects > 100 nm below 0.05/cm2. These improvements have resulted from a number of ion-beam sputter deposition system modifications, upgrades, and operational changes, which will be discussed. Success in defect reduction is highly dependent upon defect detection, characterization, and cross- platform positional registration. We have made significant progress in adapting and extending commercial tools to this purpose, and have identified the surface scanner detection limits for different defect classes, and the signatures of false counts and non-printable scattering anomalies on the mask blank. We will present key results and how they have helped reduce added defects. The physics of defect reduction and mitigation is being investigated by a program on multilayer growth over deliberately placed perturbations (defects) of varying size. This program includes modeling of multilayer growth and modeling of defect printability. We developed a technique for depositing uniformly sized gold spheres on EUVL substrates, and have studied the suppression of the perturbations during multilayer growth under varying conditions. This work is key to determining the lower limit of critical defect size for EUV Lithography. We present key aspects of this work. We will summarize progress in all aspects of EUVL mask blank development, and present detailed results on defect reduction and mask blank performance at EUV wavelengths.

Low-defect reflective mask blanks for extreme Ultraviolet Lithography

EUVL is an emerging technology for fabrication of sub-100 nm feature sizes on silicon, following the SIA roadmap well into the 21st Century. The specific EUVL system described is a scanned, projection lithography system with a 4:1 reduction, using a laser plasma EUV source. The mask and all of the system optics are reflective, multilayer mirrors which function in the extreme UV at 13.4 nm wavelength. Since the masks are imaged to the wafer exposure plane, mask defects greater than 80 percent of the exposure plane CD will in many cases render the mask useless, whereas intervening optics can have defects which are not a printing problem. For the 100 nm node, we must reduce defects to less than 0.01/cm2 at 80 nm or larger to obtain acceptable mask production yields. We have succeeded in reducing the defects to less than 0.1/cm2 for defects larger than 130 nm detected by visible light inspection tools, however our program goal is to achieve 0.01/cm2 in the near future. More importantly though, we plan to have a detailed understanding of defect origination and the effect on multilayer growth in order to mitigate defects below the ion-beam multilayer deposition tool, details of the defect detection and characterization facility, and progress on defect printability modeling.

Temporal shaping of third-harmonic pulses on the Nova laser system

We demonstrate temporal shaping of 0.35-microm-wavelength pulses produced by a third-harmonic conversion of the output from the Nova Nd:phosphate glass-laser amplifier system for use in inertial confinement fusion experiments. We describe the computer models used to calculate the pulse shape that is required as the input to the amplifier system, the experimental apparatus used to produce these pulses, and the high-power 0.35-microm shaped pulses produced in recent experiments.