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Sean S. Kang

Applied Materials

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Publication

Featured researches published by Sean S. Kang.

Archive | 2013

METHODS FOR ETCHING AN ETCHING STOP LAYER UTILIZING A CYCLICAL ETCHING PROCESS

Mang-Mang Ling; Sean S. Kang; Srinivas D. Nemani; Bradley J. Howard

Archive | 2013

NEAR SURFACE ETCH SELECTIVITY ENHANCEMENT

Lina Zhu; Sean S. Kang; Srinivas D. Nemani; Sergey G. Belostotskiy

Archive | 2013

METHOD OF REMOVING A METAL HARDMASK

Chia-Ling Kao; Kwang-Soo Kim; Sean S. Kang; Srinivas D. Nemani

Archive | 2013

Delicate dry clean

Lina Zhu; Sean S. Kang; Srinivas D. Nemani; Chia-Ling Kao

Archive | 2014

METHOD FOR MATERIAL REMOVAL IN DRY ETCH REACTOR

Olivier Luere; Srinivas D. Nemani; Sean S. Kang

Archive | 2014

DIRECTED BLOCK COPOLYMER SELF-ASSEMBLY PATTERNS FOR ADVANCED PHOTOLITHOGRAPHY APPLICATIONS

Mang-Mang Ling; Lina Zhu; Nancy Fung; Kwang-Soo Kim; Sean S. Kang; Srinivas D. Nemani

Archive | 2014

Methods for etching a dielectric barrier layer in a dual damascene structure

He Ren; Chia-Ling Kao; Sean S. Kang; Srinivas D. Nemani; Mehul Naik

Archive | 2014

RECESSING ULTRA-LOW K DIELECTRIC USING REMOTE PLASMA SOURCE

Mang Mang Ling; Sean S. Kang; Srinivas D. Nemani; Bradley J. Howard

Archive | 2013

Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process

Mang-Mang Ling; Jungmin Ko; Sean S. Kang; Srinivas D. Nemani; Bradley J. Howard

Archive | 2013

Silicon oxide recess etch

Nancy Fung; David T. Or; Qingjun Zhou; Lina Zhu; Srinivas D. Nemani; Sean S. Kang; Sergey G. Belostotskiy; Chinh Dinh

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Collaboration

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Srinivas D. Nemani

Applied Materials

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Lina Zhu

Applied Materials

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Chia-Ling Kao

Applied Materials

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Bradley J. Howard

Applied Materials

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Mang-Mang Ling

Applied Materials

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Sergey G. Belostotskiy

Applied Materials

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Ellie Yieh

Applied Materials

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He Ren

Applied Materials

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Kwang-Soo Kim

Applied Materials

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Mehul Naik

Applied Materials

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