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Seiichi Morimoto

Intel

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Publication

Featured researches published by Seiichi Morimoto.

Archive | 1990

Method for conditioning the surface of a polishing pad

Wayne A. Mattingly; Seiichi Morimoto; Spencer E. Preston

Archive | 1991

Apparatus for planarizing a dielectric formed over a semiconductor substrate

Seiichi Morimoto; Robert J. Patterson

Archive | 1990

Method of planarizing a dielectric formed over a semiconductor substrate

Seiichi Morimoto; Robert J. Patterson

Archive | 2009

POLISH TO REMOVE TOPOGRAPHY IN SACRIFICIAL GATE LAYER PRIOR TO GATE PATTERNING

Joseph M. Steigerwald; Uday Shah; Seiichi Morimoto; Nancy M. Zelick

Archive | 1995

Elimination of pad conditioning in a chemical mechanical polishing process

Seiichi Morimoto; Ebrahim Andideh

Archive | 1988

Semiconductor planarization process

Seiichi Morimoto

Archive | 1997

Merging dummy structure representations for improved distribution of artifacts in a semiconductor layer

Seiichi Morimoto; Timothy L. Deeter

Archive | 1997

Polysilicon polish for patterning improvement

Mark Bohr; Lawrence N. Brigham; Peter K. Moon; Seiichi Morimoto

Archive | 2005

Unidirectionally conductive materials for interconnection

Reza M. Golzarian; Robert P. Meagley; Seiichi Morimoto; Mansour Moinpour

Archive | 1991

VERFAHREN UND VORRICHTUNG ZUM PLANAR-SCHLEIFEN DER OBERFLAECHE EINES DIELEKTRIKUMS, DAS AUF EINEM HALBLEITER-SUBSTRAT AUFGEBRACHT IST

Seiichi Morimoto

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Robert J. Patterson

Intel

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Ebrahim Andideh

Intel

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Joseph M. Steigerwald

Intel

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Lawrence N. Brigham

Intel

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Mansour Moinpour

Intel

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Mark Bohr

Intel

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Nancy M. Zelick

Intel

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Peter K. Moon

Intel

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Reza M. Golzarian

Intel

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Robert P. Meagley

Intel

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