Seiji Isogai
Hitachi
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Publication
Featured researches published by Seiji Isogai.
In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing. Conference | 1999
Fumio Mizuno; Seiji Isogai
Yield prediction using scanning electron microscope- automatic defect classification has the advantage of accuracy as compared with that using optical ADC because SEMs have higher resolving power and give us more information of particle/pattern-defect shape and surface texture than optical microscopes. We have proposed a method to predict die and wafer yield using SEM-ADC, it features (1) defect sampling which is performed in terms of die groups, (2) defect classification which enable us to get killer rates of defects, and (3) yield prediction taking account of the effects of prior level defects.
Archive | 1999
Ryo Nakagaki; Yuji Takagi; Atsushi Shimoda; Kenji Obara; Yasuhiko Ozawa; Hideka Bamba; Seiji Isogai; Kenji Watanabe; Chie Shishido; Toshiei Kurosaki
Archive | 2006
Kenji Obara; Yuji Takagi; Ryo Nakagaki; Yasuhiro Ozawa; Toshiei Kurosaki; Seiji Isogai
Archive | 2006
Yoko Ikeda; Junko Konishi; Hisafumi Iwata; Yuji Takagi; Kenji Obara; Ryo Nakagaki; Seiji Isogai; Yasuhiko Ozawa
Archive | 2006
Atsushi Shimoda; Ichirou Ishimaru; Yuji Takagi; Takuo Tamura; Yuichi Hamamura; Kenji Watanabe; Yasuhiko Ozawa; Seiji Isogai
Archive | 2007
Takanori Ninomiya; Seiji Isogai; Shigeru Matsui; Toshiei Kurosaki
Archive | 1999
Kenji Obara; Yuji Takagi; Atsushi Shimoda; Ryou Nakagaki; Seiji Isogai; Yasuhiko Ozawa; Hideka Banba; Kenji Watanabe; Chie Shishido
Archive | 2001
Atsushi Shimoda; Ichirou Ishimaru; Yuji Takagi; Takuo Tamura; Yuichi Hamamura; Kenji Watanabe; Yasuhiko Ozawa; Seiji Isogai
Archive | 2010
Tsunehiro Sakai; 恒弘 堺; Shigeki Kurihara; 栗原 茂樹; Yutaka Tandai; 裕 丹代; Tamao Ishikawa; 玉雄 石川; Yuichi Hamamura; 濱村 有一; Tomohiro Funakoshi; 知弘 船越; Seiji Isogai; 静志 磯貝; Katsuhiko Ichinose; 一瀬 勝彦
Archive | 2010
Tsunehiro Sakai; Shigeki Kurihara; Yutaka Tandai; Tamao Ishikawa; Yuichi Hamamura; Tomohiro Funakoshi; Seiji Isogai; Katsuhiko Ichinose
