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Sergio Fukuda Shoji

Applied Materials

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Publication

Featured researches published by Sergio Fukuda Shoji.

Archive | 2010

SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING

Bryan Liao; Katsumasa Kawasaki; Yashaswini B. Pattar; Sergio Fukuda Shoji; Duy D. Nguyen; Kartik Ramaswamy; Ankur Agarwal; Phillip Stout; Shahid Rauf

Archive | 2004

Method for performing real time arcing detection

Sergio Fukuda Shoji

Archive | 2011

COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DUTY CYCLE CONTROL

Chetan Mahadeswaraswamy; Kartik Ramaswamy; Bryan Liao; Sergio Fukuda Shoji; Duy D. Nguyen; Hamid Noorbakhsh; David Palagashvili

Archive | 2010

Methods and apparatus for tuning matching networks

Chunlei Zhang; Sergio Fukuda Shoji; Andrey Semenin; Kartik Ramaswamy; James P. Cruse; Bryan Liao

Archive | 2010

Feedforward temperature control for plasma processing apparatus

Chetan Mahadeswaraswamy; Walter R. Merry; Sergio Fukuda Shoji; Chunlei Zhang; Yashaswini B. Pattar; Duy D. Nguyen; Tina Tsong; Shane C. Nevil; Douglas A. Buchberger; Fernando M. Silveira; Brad L. Mays; Kartik Ramaswamy; Hamid Noorbakhsh

Archive | 2013

METHODS FOR ETCHING MATERIALS USING SYNCHRONIZED RF PULSES

Jong Mun Kim; Daisuke Shimizu; Katsumasa Kawasaki; Sergio Fukuda Shoji

Archive | 2002

Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system

Brad L. Mays; Tetsuya Ishikawa; Sergio Fukuda Shoji

Archive | 2017

RF POWER DELIVERY WITH APPROXIMATED SAW TOOTH WAVE PULSING

Katsumasa Kawasaki; Sergio Fukuda Shoji; Justin Phi; Daisuke Shimizu

Archive | 2017

RF POWER DELIVERY REGULATION FOR PROCESSING SUBSTRATES

Katsumasa Kawasaki; Justin Phi; Sergio Fukuda Shoji

Archive | 2014

RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL DIMENSION UNIFORMITY IN PLASMA REACTORS

Sergio Fukuda Shoji; Hamid Noorbakhsh; Jong Mun Kim; Jason Della Rosa; Ajit Balakrishna

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Kartik Ramaswamy

Applied Materials

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Justin Phi

Applied Materials

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Katsumasa Kawasaki

Applied Materials

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Brad L. Mays

Applied Materials

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Duy D. Nguyen

Applied Materials

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Hamid Noorbakhsh

Applied Materials

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Bryan Liao

Applied Materials

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Chunlei Zhang

Applied Materials

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Daisuke Shimizu

Applied Materials

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Jong Mun Kim

Applied Materials

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