Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Hamid Noorbakhsh is active.

Publication


Featured researches published by Hamid Noorbakhsh.


Archive | 2000

Support assembly with thermal expansion compensation

Gerhard Schneider; Hamid Noorbakhsh; Bryan Pu; Kaushik Vaidya; Brad L. Mays; Hung Dao; Evans Lee; Hongging Shan


Archive | 2002

Dielectric etch chamber with expanded process window

James D. Carducci; Hamid Noorbakhsh; Evans Lee; Bryan Pu; Hongching Shan; Claes Bjorkman; Siamak Salimian; Paul E. Luscher; Michael Welch


Archive | 2004

Gas distribution showerhead for semiconductor processing

Hamid Noorbakhsh; James D. Carducci; Jennifer Y. Sun; Larry D. Elizaga


Archive | 2001

Gas distribution plate electrode for a plasma reactor

Dan Katz; Douglas A. Buchberger; Yan Ye; Robert B. Hagen; Xiaoye Zhao; Ananda H. Kumar; Kang-Lie Chiang; Hamid Noorbakhsh; Shiang-Bau Wang


Archive | 1999

Chuck having pressurized zones of heat transfer gas

Shamouil Shamouilian; Arnold Kholodenko; Siamak Salimian; Hamid Noorbakhsh; Efrain Quiles; Dennis S. Grimard


Archive | 1999

Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates

Hamid Noorbakhsh; Michael Welch; Siamak Salimian; Paul E. Luscher; Hongching Shan; Kaushik Vaidya; Jim Carducci; Evans Lee


Archive | 2012

Plasma resistant ceramic coated conductive article

Jennifer Y. Sun; Biraja P. Kanungo; Ren-Guan Duan; Hamid Noorbakhsh; Junhan Yuh; Dmitry Lubomirsky


Archive | 2000

Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system

Kadthala R. Narendrnath; Liang-Guo Wang; Shamouil Shamouilian; Paul E. Luscher; Hamid Noorbakhsh


Archive | 2001

Magnetic barrier for plasma in chamber exhaust

James D. Carducci; Hamid Noorbakhsh; Evans Lee; Hongqing Shan; Siamak Salimian; Paul E. Luscher; Michael Welch


Archive | 2002

Temperature controlled semiconductor processing chamber liner

Hamid Noorbakhsh; Siamak Salimian; Paul E. Luscher; James D. Carducci; Evans Lee; Kaushik Vaidya; Hongqing Shan; Michael Welch

Collaboration


Dive into the Hamid Noorbakhsh's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge