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Brad L. Mays

Applied Materials

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Publication

Featured researches published by Brad L. Mays.

Archive | 2000

Support assembly with thermal expansion compensation

Gerhard Schneider; Hamid Noorbakhsh; Bryan Pu; Kaushik Vaidya; Brad L. Mays; Hung Dao; Evans Lee; Hongging Shan

Archive | 2001

Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe

Hamid Norrbakhsh; Mike Welch; Paul E. Luscher; Siamak Salimian; Brad L. Mays

Archive | 2001

Electrostatic chuck with dielectric coating

Arnold Kholodenko; Michael G. Chafin; Brad L. Mays; Tetsuya Ishikawa; Amanda H. Kumar; Dennis S. Grimard

Archive | 2010

Feedforward temperature control for plasma processing apparatus

Chetan Mahadeswaraswamy; Walter R. Merry; Sergio Fukuda Shoji; Chunlei Zhang; Yashaswini B. Pattar; Duy D. Nguyen; Tina Tsong; Shane C. Nevil; Douglas A. Buchberger; Fernando M. Silveira; Brad L. Mays; Kartik Ramaswamy; Hamid Noorbakhsh

Archive | 2011

TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW

Fernando M. Silveira; Hamid Tavassoli; Xiaoping Zhou; Shane C. Nevil; Douglas A. Buchberger; Brad L. Mays; Tina Tsong; Chetan Mahadeswaraswamy; Yashaswini B. Pattar; Duy D. Nguyen; Walter R. Merry

Archive | 2002

Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system

Brad L. Mays; Tetsuya Ishikawa; Sergio Fukuda Shoji

Archive | 2014

Electrostatic chuck having thermally isolated zones with minimal crosstalk

Vijay D. Parkhe; Konstantin Makhratchev; Jason Della Rosa; Hamid Noorbakhsh; Brad L. Mays; Douglas A. Buchberger

Archive | 2017

Showerhead with reduced backside plasma ignition

Haitao Wang; Hamid Noorbakhsh; Chunlei Zhang; Sergio Fukuda Shoji; Kartik Ramaswamy; Roland Smith; Brad L. Mays

Archive | 2016

SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM

Phillip Criminale; Justin Phi; Dan Marohl; Sergio Fukuda Shoji; Brad L. Mays

Archive | 2013

DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER

Fernando M. Silveira; Brad L. Mays

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Collaboration

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Douglas A. Buchberger

Applied Materials

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Fernando M. Silveira

Applied Materials

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Hamid Noorbakhsh

Applied Materials

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Sergio Fukuda Shoji

Applied Materials

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Chetan Mahadeswaraswamy

Applied Materials

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Duy D. Nguyen

Applied Materials

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Shane C. Nevil

Applied Materials

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Tina Tsong

Applied Materials

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Walter R. Merry

Applied Materials

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Yashaswini B. Pattar

Applied Materials

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