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Shan Christopher Clark

Intel

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Publication

Featured researches published by Shan Christopher Clark.

Archive | 2005

Layered films formed by controlled phase segregation

Robert P. Meagley; Michael J. Leeson; Michael D. Goodner; Bob E. Leet; Michael L. McSwiney; Shan Christopher Clark

Archive | 2004

Cleaning composition, method of cleaning semiconductor substrate, and method of forming wiring on semiconductor substrate

Shigeru Yokoi; Kazumasa Wakiya; Takayuki Haraguchi; Makarem A. Hussein; Lana I. Jong; Shan Christopher Clark

Archive | 2004

Cleaning composition and method of cleaning semiconductor substrate

Shigeru Yokoi; Kazumasa Wakiya; Takayuki Haraguchi; Makarem A. Hussein; Lana I. Jong; Shan Christopher Clark

Archive | 2003

Reducing photoresist line edge roughness using chemically-assisted reflow

Robert P. Meagley; Michael D. Goodner; Ernisse S. Putna; Shan Christopher Clark; Wang Yueh

Archive | 2004

Basic supercritical solutions for quenching and developing photoresists

Shan Christopher Clark; Kim-khanh Ho; James S. Clarke; Ernisse S. Putna; Wang Yueh

Archive | 2005

Basic quencher/developer solutions for photoresists

Shan Christopher Clark; Kim-khanh Ho; James S. Clarke; Ernisse S. Putna; Wang S. Yueh; Robert P. Meagley

Archive | 2003

Cleaning residues from semiconductor structures

Shan Christopher Clark; Vijayakumar S. Ramachandrarao; Robert B. Turkot

Archive | 2004

Novel anti-reflective coatings

Shan Christopher Clark; Ernisse S. Putna; Robert P. Meagley

Archive | 2008

PHOTORESIST AND ANTIREFLECTIVE LAYER REMOVAL SOLUTION AND METHOD THEREOF

Vijayakumar S. Ramachandrarao; Melanie S. Reyes; Shan Christopher Clark; John O'Sullivan

Archive | 2003

Photoresist performance through control of polymer characteristics

Wang Yueh; Robert P. Meagley; Michael D. Goodner; Shan Christopher Clark; Ernisse S. Putna

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Ernisse S. Putna

Intel

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Lana I. Jong

Intel

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Makarem A. Hussein

Intel

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Robert P. Meagley

Intel

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Shigeru Yokoi

Intel

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Takayuki Haraguchi

Intel

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Michael D. Goodner

Intel

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James S. Clarke

Intel

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Kazumasa Wakiya

NEC

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Kim-khanh Ho

Intel

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