Shane C. Nevil | Researchain

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Archive | 2012

TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP

Satoru Kobayashi; Lawrence Wong; Jonathan Liu; Yang Yang; Kartik Ramaswamy; Shahid Rauf; Shane C. Nevil; Kallol Bera; Kenneth S. Collins

Archive | 2010

Feedforward temperature control for plasma processing apparatus

Chetan Mahadeswaraswamy; Walter R. Merry; Sergio Fukuda Shoji; Chunlei Zhang; Yashaswini B. Pattar; Duy D. Nguyen; Tina Tsong; Shane C. Nevil; Douglas A. Buchberger; Fernando M. Silveira; Brad L. Mays; Kartik Ramaswamy; Hamid Noorbakhsh

Archive | 2008

Fast substrate support temperature control

Richard Fovell; Paul Brillhart; Sang In Yi; Anisul Khan; Jivko Dinev; Shane C. Nevil

Archive | 2011

TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW

Fernando M. Silveira; Hamid Tavassoli; Xiaoping Zhou; Shane C. Nevil; Douglas A. Buchberger; Brad L. Mays; Tina Tsong; Chetan Mahadeswaraswamy; Yashaswini B. Pattar; Duy D. Nguyen; Walter R. Merry

Archive | 2012

Fast response fluid temperature control system

Douglas A. Buchberger; Shane C. Nevil; Kartik Ramaswamy; Kenneth S. Collins; Richard Fovell

Archive | 2013

PLASMA PROCESSING USING RF RETURN PATH VARIABLE IMPEDANCE CONTROLLER WITH TWO-DIMENSIONAL TUNING SPACE

Nipun Misra; Kartik Ramaswamy; Yang Yang; Douglas A. Buchberger; James D. Carducci; Lawrence Wong; Shane C. Nevil; Shahid Rauf; Kenneth S. Collins

Archive | 2014

MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE UNIFORMITY

Hamid Tavassoli; Surajit Kumar; Kallol Bera; Xiaoping Zhou; Shane C. Nevil; Douglas A. Buchberger

Archive | 2013

Temperature management of aluminium nitride electrostatic chuck

Sumanth Banda; Jennifer Y. Sun; Douglas A. Buchberger; Shane C. Nevil

Archive | 2008

Substrate support temperature control

Richard Fovell; Paul Brillhart; Sang In Yi; Anisul Khan; Jivko Dinev; Shane C. Nevil

Archive | 2011

Commande de température dans un équipement de traitement au plasma utilisant un écoulement fluide de transfert de chaleur pulsé

Douglas A. Buchberger; Chetan Mahadeswaraswamy; Brad L. Mays; Walter R. Merry; Shane C. Nevil; Duy D. Nguyen; Yashaswini B. Pattar; Fernando M. Silveira; Hamid Tavassoli; Tina Tsong; Xiaoping Zhou

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