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Sheshraj L. Tulshibagwale

Applied Materials

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Publication

Featured researches published by Sheshraj L. Tulshibagwale.

Archive | 2001

Lift pin alignment and operation methods and apparatus

Dmitry Lubomirsky; Sheshraj L. Tulshibagwale; Donald J. K. Olgado; Avi Tepman

Archive | 2002

Electrochemical processing cell

Michael X. Yang; Dmitry Lubomirsky; Yezdi Dordi; Saravjeet Singh; Sheshraj L. Tulshibagwale; Nicolay Y. Kovarsky

Archive | 2007

Scrubber brush with sleeve and brush mandrel for use with the scrubber brush

Hui Chen; Sheshraj L. Tulshibagwale; Hideshi Takahashi; Toshikazu Tomita; Takashi Fujikawa

Archive | 2003

Tilted electrochemical plating cell with constant wafer immersion angle

Dmitry Lubomirsky; Saravjeet Singh; Yezdi Dordi; Sheshraj L. Tulshibagwale

Archive | 2002

Wafer backside electrical contact for electrochemical deposition and electrochemical mechanical polishing

Dmitry Lubomirsky; Michael Yang; Sheshraj L. Tulshibagwale; Yezdi Dordi; Howard Grunes; Jick M. Yu; Fusen Chen

Archive | 2007

Multiple substrate vapor drying systems and methods

Donald J. K. Olgado; Simon Yavelberg; Edwin Velaquez; Hui Chen; Sheshraj L. Tulshibagwale; Ho Seon Shin

Archive | 2007

Methods and apparatus for supporting a substrate in a horizontal orientation during cleaning

Donald J. K. Olgado; Roy C. Nangoy; Sheshraj L. Tulshibagwale; Hui Chen; Ho Seon Shin

Archive | 2008

Flow control module for a fluid delivery system

Chris Melcer; Thuy Britcher; Avi Tepman; Simon Yavelberg; Sheshraj L. Tulshibagwale

Archive | 2007

SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING

Donald J. K. Olgado; Ho Seon Shin; Sheshraj L. Tulshibagwale; Roy C. Nangoy; Hui Chen; Allen L. D'Ambra

Archive | 2007

HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES

Donald J. K. Olgado; Sheshraj L. Tulshibagwale; Thomas Brezoczky; John S. Lewis; Ho Seon Shin; Hui Chen; Roy C. Nangoy

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Collaboration

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Dmitry Lubomirsky

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Hui Chen

Applied Materials

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Ho Seon Shin

Applied Materials

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Saravjeet Singh

Applied Materials

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Yezdi Dordi

Applied Materials

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Roy C. Nangoy

Applied Materials

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Avi Tepman

Applied Materials

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Michael X. Yang

Applied Materials

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Nicolay Y. Kovarsky

Applied Materials

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