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Ho Seon Shin

Applied Materials

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Publication

Featured researches published by Ho Seon Shin.

Archive | 2007

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

Ho Seon Shin; Gary C. Ettinger; Donald J. K. Olgado; Erik C. Wasinger; Sen-Hou Ko; Charles I. Dodds; Yufei Chen; Wei-Yung Hsu

Archive | 2005

Methods and apparatus for processing a substrate

Erik C. Wasinger; Gary C. Ettinger; Sen-Hou Ko; Wei-Yung Hsu; Liang-Yuh Chen; Ho Seon Shin; Donald J. K. Olgado

Archive | 2006

Methods and apparatus for cleaning an edge of a substrate

Wei-Yung Hsu; Donald J. K. Olgado; Ho Seon Shin; Liang-Yuh Chen

Archive | 2005

Bubble suppressing flow controller with ultrasonic flow meter

Songjae Lee; Ho Seon Shin; Donald J. K. Olgado

Archive | 2007

Multiple substrate vapor drying systems and methods

Donald J. K. Olgado; Simon Yavelberg; Edwin Velaquez; Hui Chen; Sheshraj L. Tulshibagwale; Ho Seon Shin

Archive | 2007

Methods and apparatus for supporting a substrate in a horizontal orientation during cleaning

Donald J. K. Olgado; Roy C. Nangoy; Sheshraj L. Tulshibagwale; Hui Chen; Ho Seon Shin

Archive | 2007

SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING

Donald J. K. Olgado; Ho Seon Shin; Sheshraj L. Tulshibagwale; Roy C. Nangoy; Hui Chen; Allen L. D'Ambra

Archive | 2006

Methods and apparatus for drying a substrate

Gary C. Ettinger; Michael E. Khau; Ho Seon Shin

Archive | 2007

Methods and apparatus for improving edge cleaning of a substrate

Hui Chen; Anne-douce M. P. Coulin; Ho Seon Shin; Donald J. K. Olgado

Archive | 2007

HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES

Donald J. K. Olgado; Sheshraj L. Tulshibagwale; Thomas Brezoczky; John S. Lewis; Ho Seon Shin; Hui Chen; Roy C. Nangoy

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Donald J. K. Olgado

Applied Materials

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Hui Chen

Applied Materials

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Gary C. Ettinger

Applied Materials

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Sheshraj L. Tulshibagwale

Applied Materials

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Roy C. Nangoy

Applied Materials

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Wei-Yung Hsu

Applied Materials

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Erik C. Wasinger

Applied Materials

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Sen-Hou Ko

Applied Materials

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Charles I. Dodds

Applied Materials

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Liang-Yuh Chen

Applied Materials

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