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Roy C. Nangoy

Applied Materials

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Publication

Featured researches published by Roy C. Nangoy.

Archive | 2009

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

Roy C. Nangoy; Shou-sung Chang; Donald J. K. Olgado; Hung Chih Chen; Gerald John Alonzo

Archive | 2004

Apparatus and methods for positioning wafers

Roy C. Nangoy

Archive | 2008

IN-SITU PERFORMANCE PREDICTION OF PAD CONDITIONING DISK BY CLOSED LOOP TORQUE MONITORING

Sameer Deshpande; Shou-sung Chang; Hung Chih Chen; Roy C. Nangoy; Stan D. Tsai

Archive | 2005

Closed loop control on liquid delivery system ECP slim cell

Roy C. Nangoy; Allen L. D'Ambra; Yevgeniy Rabinovich; David Z. Chen; Tao Li

Archive | 2009

METHOD AND APPARATUS OF A SUBSTRATE ETCHING SYSTEM AND PROCESS

Sharma Pamarthy; Jon C. Farr; Khalid Sirajuddin; Ezra Robert Gold; James P. Cruse; Scott Olszewski; Roy C. Nangoy; Saravjeet Singh; Douglas A. Buchberger; Jared Ahmad Lee; Chunlei Zhang

Archive | 2014

MULTI ZONE HEATING AND COOLING ESC FOR PLASMA PROCESS CHAMBER

Roy C. Nangoy; Dmitry Lubomirsky

Archive | 2011

Measurement of pad thickness and control of conditioning

Roy C. Nangoy; Hung Chih Chen; Shou-sung Chang; Erik S. Rondum; Sameer Deshpande

Archive | 2014

Cooling pedestal for dicing tape thermal management during plasma dicing

Roy C. Nangoy

Archive | 2011

High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity

Jivko Dinev; Saravjeet Singh; Roy C. Nangoy

Archive | 2012

Method and apparatus for fast gas exchange, fast gas switching and programmable gas delivery

Saravjeet Singh; Roy C. Nangoy

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Collaboration

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Saravjeet Singh

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Ho Seon Shin

Applied Materials

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Hui Chen

Applied Materials

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Jon C. Farr

Applied Materials

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Sharma Pamarthy

Applied Materials

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Sheshraj L. Tulshibagwale

Applied Materials

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Hung Chih Chen

Applied Materials

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Shou-sung Chang

Applied Materials

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Ajay Kumar

Applied Materials

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