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Yezdi Dordi

Lam Research

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Publication

Featured researches published by Yezdi Dordi.

Archive | 2003

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

Mike Ravkin; John M. Boyd; Yezdi Dordi; Fred C. Redeker; John M. de Larios

Archive | 2006

Processes and Systems for Engineering a Barrier Surface for Copper Deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2007

Apparatus and method for pre and post treatment of atomic layer deposition

Hyungsuk Alexander Yoon; Mikhail Korolik; Fritz C. Redeker; John M. Boyd; Yezdi Dordi

Archive | 2007

Methods of post-contact back end of line through-hole via integration

John M. Boyd; Fritz C. Redeker; Yezdi Dordi; Hyungsuk Alexander Yoon; Shijian Li

Archive | 2006

Processes and systems for engineering a silicon-type surface for selective metal deposition to form a metal silicide

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Johan Vertommen; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2007

APPARATUS AND METHOD FOR INTEGRATED SURFACE TREATMENT AND DEPOSITION FOR COPPER INTERCONNECT

Hyungsuk Alexander Yoon; Mikhail Korolik; Fritz C. Redeker; John M. Boyd; Yezdi Dordi

Archive | 2007

Electroless plating method and apparatus

William Thie; John M. Boyd; Yezdi Dordi; Fritz C. Redeker

Archive | 2007

Plating solutions for electroless deposition of copper

Yezdi Dordi; William Thie; Algirdas Vaskelis; Eugenijus Norkus; Jane Jaciauskiene; Aldona Jagminiene

Archive | 2006

System and method for forming patterned copper lines through electroless copper plating

Alan Lee; Andrew D. Bailey; William Thie; Yunsang Kim; Yezdi Dordi

Archive | 2006

Processes and systems for engineering a copper surface for selective metal deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Fritz C. Redeker; William Thie; Arthur M. Howald

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Collaboration

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John M. Boyd

Lam Research

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Fritz C. Redeker

Lam Research

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William Thie

Lam Research

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Hyungsuk Alexander Yoon

Lam Research

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Fred C. Redeker

Lam Research

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Aniruddha Joi

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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Arthur M. Howald

Lam Research

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Shijian Li

Lam Research

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Aldona Jagminiene

Lam Research

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