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Dive into the research topics where Shigenori Kitahara is active.

Publication


Featured researches published by Shigenori Kitahara.


Archive | 1998

Drying treatment method and apparatus

Yuji Kamikawa; Teruomi Minami; Shigenori Kitahara


Archive | 1998

Substrate transporting and processing system

Satoshi Kaneko; Yuji Kamikawa; Akira Koguchi; Osamu Kuroda; Shigenori Kitahara; Tatsuya Nishida


Archive | 1996

Apparatus and method for washing substrates

Naoki Shindo; Shigenori Kitahara; Takayuki Toshima; Kenji Yokomizo


Archive | 2000

Cleaning method and cleaning equipment

Yuji Kamikawa; Naoki Shindo; Shigenori Kitahara; Miyako Yamasaka


Archive | 1997

Method for washing substrates

Naoki Shindo; Shigenori Kitahara; Takayuki Toshima; Kenji Yokomizo


Archive | 1997

Substrate carrying and processing device

Yuji Kamikawa; Satoshi Kaneko; Shigenori Kitahara; Osamu Kuroda; Rei Takaguchi; 裕二 上川; 重徳 北原; 聡 金子; 玲 高口; 黒田 修


Archive | 2001

Substrate conveying and processing apparatus

Yuji Kamikawa; Satoshi Kaneko; Shigenori Kitahara; Osamu Kuroda; Rei Takaguchi; 裕二 上川; 重徳 北原; 聡 金子; 玲 高口; 黒田 修


Archive | 2001

Cleaning method and apparatus

Naoki Shindo; Shigenori Kitahara; Hironobu Hyakutake


Archive | 2008

Liquid processing apparatus and process liquid supplying method

Yuji Kamikawa; Shigenori Kitahara


Archive | 2001

Liquid processing method and liquid processing equipment

Shigenori Kitahara; 重徳 北原

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