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Dive into the research topics where Shigeru Ishizawa is active.

Publication


Featured researches published by Shigeru Ishizawa.


Archive | 2003

Substrate processing device

Takaaki Matsuoka; Katsuhiko Iwabuchi; Shigeru Ishizawa; Tsutomu Hiroki


Archive | 2002

Semiconductor processing system

Shigeru Ishizawa; Hiroaki Saeki; Yoshimitsu Tamura; Shigetoshi Hosaka; Masahide Itoh; Kazushi Tahara; Yasushi Kodashima


Archive | 1999

Carrier system positioning method

Yasuhiko Nishinakayama; Shigeru Ishizawa; Hiroaki Saeki; Takashi Kawano; Tetsu Osawa


Archive | 1995

Apparatus and method for performing serial communication between master and slave devices

Teruo Asakawa; Akiyoshi Shoujima; Shigeru Ishizawa


Archive | 2002

Processed body carrying device, and processing system with carrying device

Shigeru Ishizawa; Hiroaki Saeki


Archive | 2004

Transportation apparatus and drive mechanism

Hiroaki Saeki; Shigeru Ishizawa; Takehiro Shindo; Tsutomu Hiroki; Wataru Machiyama


Archive | 2006

Transfer apparatus for target object

Wataru Machiyama; Shigeru Ishizawa; Hiroshi Koizumi; Tsutomu Hiroki; Keisuke Kondoh


Archive | 1998

Method of sensing access positions of arm

Shigeru Ishizawa; Keiichi Matsushima


Archive | 2003

Method for carrying object to be processed

Shigeru Ishizawa; Eiji Horike


Archive | 2005

Substrate processing device, transportation device, and control method of transportation device

Tsutomu Hiroki; Shigeru Ishizawa; Hiroshi Koizumi; Keisuke Kondo; Wataru Machiyama; 浩 小泉; 勤 広木; 弥 町山; 繁 石沢; 圭祐 近藤

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