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Shigeru Nakamoto

Hitachi

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Publication

Featured researches published by Shigeru Nakamoto.

Archive | 2004

Methods of operating vacuum processing equipment and methods of processing wafers

Tooru Ueno; Shigeru Nakamoto; Shoji Okiguchi; Hideki Yamasaki; Kouji Nishihata

Archive | 2003

Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system

Shigeru Nakamoto; Hideaki Kondo; Juntaro Arima

Archive | 2001

Operation of vacuum treatment equipment and method for processing wafer

Shigeru Nakamoto; Koji Nishihata; Masashi Okiguchi; Toru Ueno; Hideki Yamazaki; 透 上野; 中元 茂; 秀樹 山▲崎▼; 昌司 沖口; 廣治 西畑

Archive | 1999

Method and apparatus for discriminating etching end point and method of etching insulating film

Shiyouji Ikuhara; Tetsunori Kaji; Shigeru Nakamoto; Koji Nishihata; Nushito Takahashi; Taketo Usui; Takeshi Yoshioka; 中元 茂; 哲徳 加治; 健 吉岡; 祥二 幾原; 建人 臼井; 廣治 西畑; 主人 高橋

Archive | 2002

Etching end point judging device

Tatehito Usui; Ken Yoshioka; Shoji Ikuhara; Kouji Nishihata; Kazue Takahashi; Tetsunori Kaji; Shigeru Nakamoto

Archive | 1999

Etching end point judging method, etching end point judging device, and insulating film etching method using these methods

Tatehito Usui; Ken Yoshioka; Shoji Ikuhara; Kouji Nishihata; Kazue Takahashi; Tetsunori Kaji; Shigeru Nakamoto

Archive | 2007

Semiconductor production apparatus

Tatehito Usui; Motohiko Yoshigai; Kazuhiro Joo; Shigeru Nakamoto

Archive | 2016

PLASMA PROCESSING APPARATUS, DATA PROCESSING APPARATUS AND DATA PROCESSING METHOD

Seiichi Watanabe; Satomi Inoue; Shigeru Nakamoto; Kousuke Fukuchi

Archive | 2015

DATA PROCESSING METHOD, DATA PROCESSING APPARATUS AND PROCESSING APPARATUS

Seiichi Watanabe; Satomi Inoue; Shigeru Nakamoto; Kousuke Fukuchi

Archive | 2017

PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSING APPARATUS

Yohei Kawaguchi; Tatehito Usui; Masahito Togami; Satomi Inoue; Shigeru Nakamoto

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Tatehito Usui

Hitachi

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Satomi Inoue

Hitachi

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Kouji Nishihata

Hitachi

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Seiichi Watanabe

Hitachi

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Tetsunori Kaji

Hitachi

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Kazue Takahashi

Hitachi

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Ken Yoshioka

Hitachi

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Kousuke Fukuchi

Hitachi

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Masahito Togami

Hitachi

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Shoji Ikuhara

Hitachi

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