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Shih-Ho Lin

TSMC

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Publication

Featured researches published by Shih-Ho Lin.

Archive | 2004

Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process

Kei-Wei Chen; Jung-Chih Tsao; Chi-Wen Liu; Jchung-Chang Chen; Shih-Tzung Chang; Shih-Ho Lin; Yu-Ku Lin; Ying-Lang Wang

Archive | 2004

Test device and method for laser alignment calibration

Shih-Tzung Chang; Yu-Ku Lin; Shih-Ho Lin; Kei-Wei Chen; Ting-Chun Wang; Ching-hwan Su; Ying-Lang Wang

Archive | 2004

Electropolishing method for removing particles from wafer surface

Shih-Ho Lin; Chung-Chang Chen; Kei-Wei Chen; Shih-Tzung Chang; Chao-Lung Chen; Po-Jen Shih; Yu-Ku Lin; Ying-Lang Wang

Archive | 2013

Oxidation-Free Copper Metallization Process Using In-situ Baking

Yu-Sheng Wang; Shih-Ho Lin; Kei-Wei Chen; Szu-An Wu; Ying-Lang Wang

Archive | 2004

Novel ECP method for preventing the formation of voids and contamination in vias

Kei-Wei Chen; Shih-Ho Lin; Chun-Chang Chen; Ching-hwan Su; Yu-Ku Lin; Ying-Lang Wang; De-dui Marvin Liao; Meng-chao Tzeng

Archive | 2010

Current-leveling electroplating/electropolishing electrode

Shih-Chieh Chang; Ying-Lang Wang; Kei-Wei Chen; Shih-Ho Lin; Chun-Chang Chen

Archive | 2007

Forming Seed Layer in Nano-Trench Structure Using Net Deposition and Net Etch

Kei-Wei Chen; Shih-Ho Lin; Yu-Sheng Wang; Szu-An Wu; Ying-Lang Wang

Archive | 2004

Copper plating of semiconductor devices using single intermediate low power immersion step

Chao-Lung Chen; Kei-Wei Chen; Shih-Ho Lin; Ying-Lang Wang; Yu-Ku Lin; Ching-Hwanq Su; Po-Jen Shih; Shang-Chin Sung

Archive | 2006

Low-k dielectric layer, semiconductor device, and method for fabricating the same

Kei-Wei Chen; Sheng-Wen Chen; Shiu-Ko Jangjian; Shih-Ho Lin; Hung-Jui Chang; Yu-Ku Lin; Ying-Lang Wang

Archive | 2005

Plating apparatuses and processes

Kei-Wei Chen; Shih-Ho Lin; Yu-Ku Lin; Ying-Lang Wang

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Collaboration

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Kei-Wei Chen

TSMC

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Ying-Lang Wang

TSMC

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Yu-Ku Lin

TSMC

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Chao-Lung Chen

TSMC

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Po-Jen Shih

TSMC

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Shih-Tzung Chang

TSMC

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Ching-Hwanq Su

TSMC

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Ching-hwan Su

TSMC

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Chun-Chang Chen

TSMC

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Shang-Chin Sung

TSMC

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