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Dive into the research topics where Shinpei Iijima is active.

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Featured researches published by Shinpei Iijima.


Applied Physics Letters | 2002

Hexagonal polymorph of tantalum–pentoxide with enhanced dielectric constant

Masahiko Hiratani; Shin Kimura; Tomoyuki Hamada; Shinpei Iijima; Naruhiko Nakanishi

A tantalum–pentoxide dielectric with an enhanced permittivity of over 50 was found to be crystallized in a hexagonal symmetry with a=0.628 nm and c=0.389 nm. The incommensurate epitaxy of tantalum pentoxide on hcp-ruthenium metal stabilizes the hexagonal phase with √3-time periodicity in plane, as compared with that of the known hexagonal δ phase. The crystallographic assumption, which is based on one-dimensional Ta–O–Ta chain along the c axis, can explain large polarizability caused by delocalized electrons on the one-dimensional chain.


Journal of Non-crystalline Solids | 1994

Photostimulated evaporation of SiO2 at room temperature by undulator irradiation and its dependence on sample fabrication

Koichi Awazu; Hideo Onuki; Shinpei Iijima; Kikuo Watanabe

Abstract Ablation of SiO 2 films by irradiation of undulator light was examined on samples fabricated by chemical vapor deposition (CVD) and thermal oxidation of silicon. CVD samples having different values of x in SiO x were prepared by changing the mixture ratio of SiH 4 and N 2 O. The ablation rate increased of value of x in SiO x . Thermal growth oxide of silicon was also ablated by undulator irradiation at room temperature. The ablation rate increased with increasing excitation energy.


Archive | 1989

Semiconductor device having an arrangement of IGFETs and capacitors stacked thereover

Atsushi Hiraiwa; Shinichiro Kimura; Toshiyuki Mine; Takashi Kobayashi; Tokuo Kure; Shinpei Iijima; Jiro Yugami


Archive | 2003

Semiconductor integrated circuit device with capacitor of crown structure and method of manufacturing the same

Shinpei Iijima; Hiroshi Sakuma


The Japan Society of Applied Physics | 1989

Capacitance-Enhanced Stacked-Capacitor with Engraved Storage Electrode for Deep Submicron DRAMs

Toshiyuki Mine; Shinpei Iijima; Jiro Yugami; K. Ohga; T. Morimoto


Archive | 1999

Method of making a memory cell having two layered tantalum oxide films

Masato Kunitomo; Shinpei Iijima


Archive | 2005

CAPACITOR AND METHOD FOR MANUFACTURING SAME

Shinpei Iijima; 晋平 飯島


Archive | 2007

PHASE-CHANGE MEMORY DEVICE AND METHOD OF MANUFACTURING SAME

Tsutomu Hayakawa; Shinpei Iijima


Archive | 2001

Fabricating method of semiconductor integrated circuits

Yasuhiro Shimamoto; Masahiko Hiratani; Yuichi Matsui; Satoshi Yamamoto; Toshihide Nabatame; Toshio Ando; Hiroshi Sakuma; Shinpei Iijima


Archive | 1996

Method for manufacturing semiconductor integrated circuit device having a titanium electrode

Tsuyoshi Tamaru; Shinpei Iijima; Natsuki Yokoyama; Masayuki Nakata

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