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Singer Wolfgang

Carl Zeiss AG

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Publication

Featured researches published by Singer Wolfgang.

Archive | 2002

Beleuchtungssystem mit variabler Einstellung der Ausleuchtung

Singer Wolfgang

Archive | 2003

Facet mirror with several mirror facets has facets with spherical bodies with mirror surfaces in body openings, sides of spherical bodies remote from mirror surfaces mounted in bearer

Holderer Hubert; Weiss Markus; Singer Wolfgang; Seifert Andreas; Heisler Andreas; Melzer Frank; Mann Heinz; Faltus Juergen

Archive | 2004

METHOD FOR CLEANING SURFACE OF COMPONENT OF LITHOGRAPHY PROJECTOR, LITHOGRAPHY PROJECTOR, METHOD FOR MANUFACTURING DEVICE AND CLEANING SYSTEM

Bakker Levinus Peter; Kurt Ralph; Mertens Bastiaan Matthias; Weiss Markus; Trenkler Johann; Singer Wolfgang

Archive | 2008

Faltungsgeometrien für EUV-Beleuchtungssysteme

Singer Wolfgang; Antoni Martin; Wangler Johannes

Archive | 2002

ILLUMINATION OPTICAL SYSTEM WITH GRATING ELEMENT

Weiss Markus; Singer Wolfgang; Kleemann Bernd; Wedowski Marco

Archive | 2006

Collector unit for a lighting system having wavelengths < 193 nm

Dinger Udo; Hainz Joachim; Singer Wolfgang

Archive | 2003

ILLUMINATION OPTICAL SYSTEM PROVIDED WITH NESTED CONDENSER

Singer Wolfgang; Antoni Martin; Wangler Johannes; Egle Wilhelm; Banine Vadim Yevgenyevich; Loopstra Erik Roelof

Archive | 2002

Vorrichtung zum Bündeln der Strahlung einer Lichtquelle

Antoni Martin; Melzer Frank; Seifert Andreas; Singer Wolfgang

Archive | 2010

Beleuchtungssystem für die mikrolithographie

Singer Wolfgang; Wietzorrek Joachim; Hainz Joachim; Weirauch Gabriele; Maul Manfred

Archive | 2003

Projection lighting system for imaging one object near another such as in lithographic printing processes having different lens groups of selected materials

Schuster Karl-Heinz; Ulrich Wilhelm; Gruner Toralf; Kraehmer Daniel; Singer Wolfgang; Epple Alexander; Beierl Helmut; Garreis Reiner

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Collaboration

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Antoni Martin

Carl Zeiss AG

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Wangler Johannes

Carl Zeiss AG

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Weiss Markus

Carl Zeiss AG

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Hainz Joachim

Carl Zeiss AG

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Kleemann Bernd

Carl Zeiss AG

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Maul Manfred

Carl Zeiss AG

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Melzer Frank

Carl Zeiss AG

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Ulrich Wilhelm

Carl Zeiss AG

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Deguenther Markus

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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