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Dive into the research topics where Song-Moon Suh is active.

Publication


Featured researches published by Song-Moon Suh.


Archive | 2014

SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENERATION

Pulkit Agarwal; Song-Moon Suh; Glen T. Mori; Steven V. Sansoni


Archive | 2005

Contaminant reducing support system

Vijay D. Parkhe; Matthew Leopold; Timothy Ronan; Todd W. Martin; Edward Ng; Nitin Khurana; Song-Moon Suh; Richard Fay; Christopher Hagerty; Michael R. Rice; Darryl Angelo; Kurt J. Ahman; Matthew C. Tsai; Steve Sansoni


Archive | 2007

Substrate support components having quartz contact tips

Timothy Ronan; Yuanhong Guo; Robert Irwin Decottignies; Todd W. Martin; Darryl Angelo; Song-Moon Suh; Nitin Khurana; Edward Ng


Archive | 2013

METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

James M. Holden; Song-Moon Suh; Todd Egan; Kalyanjit Ghosh; Leon Volfovski; Michael R. Rice; Richard Giljum


Archive | 2013

IN SITU CHAMBER CLEAN WITH INERT HYDROGEN HELIUM MIXTURE DURING WAFER PROCESS

Robert Dinsmore; John C. Forster; Song-Moon Suh; Cheng Hsiung Tsai; Glen T. Mori


Archive | 2012

In-situ clean process for metal deposition chambers

Michael Jackson; Song-Moon Suh; Arvind Sundarajjan; Murali Narasimhan; Sriskantharajah Thirunavukarasu


Archive | 2016

SUBSTRATE TRANSFER ROBOT END EFFECTOR

Pulkit Agarwal; Daniel Greenberg; Song-Moon Suh; Jeffrey A. Brodine; Steven V. Sansoni; Glen T. Mori


Archive | 2014

Cleaning of chamber components with solid carbon dioxide particles

Song-Moon Suh; Yuanhong Guo; Guangchi Xuan; Pulkit Agarwal


Archive | 2013

FINNED SHUTTER DISK FOR A SUBSTRATE PROCESS CHAMBER

Bonnie T. Chia; Song-Moon Suh; Cheng-Hsiung Matthew Tsai; Robert Dinsmore; Glen T. Mori


Archive | 2012

TWO PIECE SHUTTER DISK ASSEMBLY FOR A SUBSTRATE PROCESS CHAMBER

Cheng-Hsiung Matthew Tsai; Ananthkrishna Jupudi; Robert Dinsmore; Song-Moon Suh

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