Darryl Angelo | Researchain

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Featured researches published by Darryl Angelo.

Archive | 1999

Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance

Darryl Angelo; Arvind Sundarrajan; Peijun Ding; James H. Tsung; Ilyoung Richard Hong; Barry Chin

Archive | 2003

Method and apparatus for sputter deposition

Suraj Rengarajan; Michael Miller; Darryl Angelo; Nirmalya Maity; Peijun Ding

Archive | 2002

Pressure modulation method to obtain improved step coverage of seed layer

Arvind Sundarrajan; Darryl Angelo; Peiijun Ding; Barry Chin; Imran Hasim

Archive | 2005

Contaminant reducing support system

Vijay D. Parkhe; Matthew Leopold; Timothy Ronan; Todd W. Martin; Edward Ng; Nitin Khurana; Song-Moon Suh; Richard Fay; Christopher Hagerty; Michael R. Rice; Darryl Angelo; Kurt J. Ahman; Matthew C. Tsai; Steve Sansoni

Archive | 2000

Temperature control of a substrate

Arvind Sundarrajan; Darryl Angelo; Tse-Yong Yao; Peijun Ding

Archive | 2007

Substrate support components having quartz contact tips

Timothy Ronan; Yuanhong Guo; Robert Irwin Decottignies; Todd W. Martin; Darryl Angelo; Song-Moon Suh; Nitin Khurana; Edward Ng

Archive | 2000

Ionized metal plasma copper vapor deposition improved in capacity of grain in thin film

Darryl Angelo; Barry Chin; Peijun Ding; Richard Hong; Arvind Sundarrajan; James H. Tsung; スンダラヤンアルヴィンド; リチャードホンイリョウン; エイチツンジェームズ; アンジェロダーリル; チンバリー; ディンペイユン

Archive | 2005