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Dive into the research topics where Sriskantharajah Thirunavukarasu is active.

Publication


Featured researches published by Sriskantharajah Thirunavukarasu.


Archive | 2015

SEALING STRUCTURE FOR WORKPIECE TO SUBSTRATE BONDING IN A PROCESSING CHAMBER

Chin Hock Toh; Tuck Foong Koh; Sriskantharajah Thirunavukarasu; Jern Sern Lew; Arvind Sundarrajan; Seshadri Ramaswami


Archive | 2014

ELECTROSTATIC CARRIER FOR HANDLING SUBSTRATES FOR PROCESSING

Arvind Sundarrajan; Jen Sern Lew; Sriskantharajah Thirunavukarasu; Karthik Elumalai


Archive | 2015

Pedestal fluid-based thermal control

Eng Sheng Peh; Sriskantharajah Thirunavukarasu; Karthik Elumalai; Kirankumar Savandaiah


Archive | 2012

In-situ clean process for metal deposition chambers

Michael Jackson; Song-Moon Suh; Arvind Sundarajjan; Murali Narasimhan; Sriskantharajah Thirunavukarasu


Archive | 2016

SELF-CLEANING SUBSTRATE CONTACT SURFACES

Jen Sern Lew; Sriskantharajah Thirunavukarasu; Mukund Sundararajan


Archive | 2016

METHODS AND APPARATUS FOR TRANSFERRING A SUBSTRATE

Sriskantharajah Thirunavukarasu; Eng Sheng Peh; Srinivas D. Nemani; Arvind Sundarrajan; Avinash Avula; Ellie Yieh


Archive | 2016

MULTI-CASSETTE CARRYING CASE

Sriskantharajah Thirunavukarasu; Eng Sheng Peh; Srinivas D. Nemani; Arvind Sundarrajan; Avinash Avula; Ellie Yieh; Michael R. Rice; Ginetto Addiego


Archive | 2018

SUPPORT DE SUBSTRAT HYBRIDE

Sriskantharajah Thirunavukarasu; Shoju Vayyapron; Anand Mahadev; Shankeerthan Kalyanasundaram; Eng Sheng Peh


Archive | 2017

SUBSTRATE CARRIER FOR ACTIVE/PASSIVE BONDING AND DE-BONDING OF A SUBSTRATE

Jen Sern Lew; Sriskantharajah Thirunavukarasu


Archive | 2017

Apparatus and method for reducing substrate sliding in process chambers

Sriskantharajah Thirunavukarasu; Kirankumar Savandaiah; Cheng-Hsiung Tsai; Kai Liang Liew

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